A study of the counter rotating vortex rings interacting with the primary vortex ring in shock tube generated flows T Murugan, S De, CL Dora, D Das, PP Kumar Fluid Dynamics Research 45 (2), 025506, 2013 | 43 | 2013 |
Computational modeling of a single microdischarge and its interactions with high frequency electromagnetic waves P PanneerChelvam, LL Raja, RR Upadhyay Journal of Physics D: Applied Physics 49 (34), 345501, 2016 | 18 | 2016 |
Modeling of thermalization phenomena in coaxial plasma accelerators V Subramaniam, P Panneerchelvam, LL Raja Journal of Physics D: Applied Physics 51 (21), 215203, 2018 | 14 | 2018 |
Modeling of gas breakdown and early transients of plasma evolution in cylindrical all-dielectric resonators PP Chelvam, LL Raja Journal of Physics D: Applied Physics 50 (47), 474003, 2017 | 12 | 2017 |
Computational modeling of the effect of external electron injection into a direct-current microdischarge PK Panneer Chelvam, LL Raja Journal of Applied Physics 118 (24), 243301, 2015 | 12 | 2015 |
Trilayer hardmask lithography and etch for BEOL manufacturing P Panneerchelvam, CM Huard, A Agarwal, AV Pret, A Mani, R Gronheid, ... Metrology, Inspection, and Process Control XXXVI 12053, 628-634, 2022 | 7 | 2022 |
Process optimization for shallow trench isolation etch using computational models S Huang, P Panneerchelvam, CM Huard, S Sridhar, PLG Ventzek, ... Journal of Vacuum Science & Technology A 41 (5), 2023 | 4 | 2023 |
Evolution of lithography-to-etch bias in multi-patterning processes P Panneerchelvam, A Agarwal, CM Huard, AV Pret, A Mani, R Gronheid, ... Journal of Vacuum Science & Technology B 40 (6), 062601, 2022 | 4 | 2022 |
Effective Preconditioners for Maxwell's equations on Unstructured Grids for Coupled Plasma-EM Wave Modeling PK Panneer Chelvam, LL Raja 55th AIAA Aerospace Sciences Meeting, 0844, 2017 | 3 | 2017 |
On the origin and evolution of hotspots in multipatterning processes P Panneerchelvam, CM Huard, T Graves, AV Pret, R Gronheid, A Agarwal, ... Journal of Vacuum Science & Technology B 41 (4), 2023 | 1 | 2023 |
Computational modeling of electromagnetic waves and their interactions with microplasmas PK Panneer Chelvam | 1 | 2017 |
Computational modeling of electromagnetic waves and their interactions with microplasmas PKP Chelvam University of Texas, 2017 | 1 | 2017 |
Computational modeling of the effect of external electron injection into a DC microdischarge P Panneerchelvam, LL Raja | 1 | 2016 |
System and method to adjust a kinetics model of surface reactions during plasma processing A Agarwal, C Huard, Y Zhang, H Pu, X Li, P Panneerchelvam, F Han, ... US Patent 11,966,203, 2024 | | 2024 |
Plasma hypermodel integrated with feature-scale profile model for accelerated etch process development C Huard, P Panneerchelvam, S Huang, MD Smith US Patent App. 17/982,472, 2024 | | 2024 |
Systems and methods for setting up a physics-based model C Huard, P Panneerchelvam, G Parsey, A Agarwal US Patent App. 17/959,712, 2023 | | 2023 |
Characterization of Inductively Coupled Plasma Source for Plasma Enhanced Atomic Layer Deposition P Panneerchelvam, A Agarwal, DR Boris, SG Walton AVS Symposium 2018, 2018 | | 2018 |
Collaborative Research: Fundamental studies of plasma control using surface embedded electronic devices LL Raja, PK PanneerChelvam, D Levko Univ. of Texas, Austin, TX (United States), 2016 | | 2016 |
Harmonic generation of microwave frequencies in plasmas P PanneerChelvam, LL Raja APS Annual Gaseous Electronics Meeting Abstracts, PR2. 004, 2015 | | 2015 |
Computational modeling of electron injection in an Argon microdischarge with DC source P Panneerchelvam, LL Raja 8th International conference on microplasmas, 2015 | | 2015 |