| Dynamic spectroscopic imaging ellipsometry D Kim, V Dembele, S Choi, G Hwang, S Kheiryzadehkhanghah, C Joo, ... Optics Letters 47 (5), 1129-1132, 2022 | 5 | 2022 |
| Robust dynamic spectroscopic imaging ellipsometer based on a monolithic polarizing Linnik interferometer G Hwang, I Choi, S Choi, S Kheiryzadehkhanghah, W Chegal, S Kim, ... Optics Express 31 (12), 19569-19587, 2023 | 4 | 2023 |
| High speed thin film thickness mapping by using dynamic spectroscopic imaging ellipsometry D Kim, V Dembele, S Choi, G Hwang, S Kheiryzadehkhanghah, I Choi, ... Optical Technology and Measurement for Industrial Applications Conference …, 2022 | 3 | 2022 |
| Robustness enhancement of dynamic spectroscopic ellipsometry by compensating temperature dependency of the monolithic polarizing interferometer I Choi, V Dembele, S Kheiryzadehkhanghah, G Hwang, B Charron, ... Applied Optics 61 (26), 7653-7661, 2022 | 3 | 2022 |
| Dynamic ultra-thin film thickness line-profile extraction from a warped Si substrate S Kheiryzadehkhanghah, G Hwang, I Choi, S Choi, D Kim Metrology, Inspection, and Process Control XXXVIII 12955, 246-249, 2024 | | 2024 |
| Dynamic spectroscopic imaging ellipsometer for high-throughput full patterned wafer mapping G Hwang, S Kheiryzadehkhanghah, S Choi, I Choi, S Kim, D Kim Metrology, Inspection, and Process Control XXXVIII 12955, 45-49, 2024 | | 2024 |
| High speed 2D material visualization by using a microscopic dynamic spectroscopic imaging ellipsometer S Choi, G Hwang, S Kheiryzadehkhanghah, I Choi, W Chegal, Y Cho, ... Metrology, Inspection, and Process Control XXXVIII 12955, 59-61, 2024 | | 2024 |
| 일체형 분광편광간섭모듈 기반분광타원편광계의 정확도 향상 G Hwang, J Shim, I Choi, S Choi, S Kheiryzadehkhanghah, D Kim 반도체디스플레이기술학회지 제 22 (3), 2023 | | 2023 |
| Full Stokes polarimetry using a monolithic off-axis polarizing interferometer and a 2D array sensor S Kheiryzadehkhanghah, V Dembele, G Hwang, J Shim, I Choi, S Choi, ... Applied Optics 62 (8), 1943-1951, 2023 | | 2023 |
| High throughput dynamic spectroscopic ellipsometry SK D. Kim G. Hwang , V. Dembele , S. Choi , I. Choi , J. Sim , S ... the 9th international conference on spectroscopic ellipsometry (ICSE-9) in …, 2022 | | 2022 |
| Stability enhancement of dynamic spectroscopic polarimeter JS D Kim I Choi, S Kheiryzadehkhanghah, S Choi, G Hwang the 9th international conference on spectroscopic ellipsometry (ICSE-9) in …, 2022 | | 2022 |
| Speed enhancement of dynamic spectroscopic ellipsometry by using direct spectral phase extraction method V Dembele, S Kheiryzadehkhanghah, G Hwang, D Kim Applied Optics 60 (35), 10867-10872, 2021 | | 2021 |
| Large scale thin film thickness uniformity extraction based on dynamic spectroscopic ellipsometry D Kim, G Hwang, S Choi, V Dembele, S Kheiryzadehkhanghah, I Choi, ... Optical Technology and Measurement for Industrial Applications Conference …, 2021 | | 2021 |
| 대면적 주기나노패턴 균일도 고속검사기술 김대석， 황국현， 최석현， 뎀베레， 바마라 한국생산제조학회 학술발표대회 논문집, 30-30, 2021 | | 2021 |
| 일체형 간섭편광변조모듈 기반 분광타원편광계의 정밀도 향상 연구 황국현， 최인호， 최석현， 심준보， 김대석 한국생산제조학회 학술발표대회 논문집, 168-168, 2021 | | 2021 |
| 일체형 간섭계 기반 타원계측기의 온도 상관성 분석 및 정밀도 향상 연구 최인호， 최석현， 황국현， 심준보， 김대석 한국생산제조학회 학술발표대회 논문집, 167-167, 2021 | | 2021 |
| Long-term Stability Optimization of Dynamic Spectroscopic Ellipsometery based on Dual-wavelength Calibration I Choi, S Kheiryzadehkhanghah, S Choi, G Hwang, J Shim, D Kim Journal of the Semiconductor & Display Technology 20 (3), 178-183, 2021 | | 2021 |
| 간섭계 기반 분광편광타원계를 이용한 박막두께 측정 김청송， 최인호， 최석현， 황국현， 김대석 대한기계학회 춘추학술대회, 43-43, 2020 | | 2020 |
| High-Speed 2d Materials Inspection Using Microscopic Dynamic Spectroscopic Imaging Ellipsometer S Choi, CY Woo, G Hwang, S Kheiryzadehkhanghah, I Choi, YJ Cho, ... Available at SSRN 4750242, 0 | | |
Daesuk KimProf. of Mechanical System Eng., Jeonbuk National UniversityVerified email at jbnu.ac.kr
