Follow
Thomas Cummins
Thomas Cummins
ASML, DCU, UCD
Verified email at mail.dcu.ie
Title
Cited by
Cited by
Year
Optimizing conversion efficiency and reducing ion energy in a laser-produced Gd plasma
T Cummins, T Otsuka, N Yugami, W Jiang, A Endo, B Li, C O’Gorman, ...
Applied Physics Letters 100 (6), 2012
632012
Reactive amine surfaces for biosensor applications, prepared by plasma-enhanced chemical vapour modification of polyolefin materials
C Volcke, RP Gandhiraman, V Gubala, J Raj, T Cummins, G Fonder, ...
Biosensors and Bioelectronics 25 (8), 1875-1880, 2010
492010
Colliding laser-produced plasmas as targets for laser-generated extreme ultraviolet sources
T Cummins, C O'Gorman, P Dunne, E Sokell, G O'Sullivan, P Hayden
Applied Physics Letters 105 (4), 2014
242014
The effect of viewing angle on the spectral behavior of a Gd plasma source near 6.7 nm
C O’Gorman, T Otsuka, N Yugami, W Jiang, A Endo, B Li, T Cummins, ...
Applied Physics Letters 100 (14), 2012
242012
PECVD coatings for functionalization of point-of-care biosensor surfaces
RP Gandhiraman, V Gubala, CC O’Mahony, T Cummins, J Raj, A Eltayeb, ...
Vacuum 86 (5), 547-555, 2012
212012
A 6.7-nm beyond EUV source as a future lithography source
T Otsuka, B Li, C O'Gorman, T Cummins, D Kilbane, T Higashiguchi, ...
Extreme Ultraviolet (EUV) Lithography III 8322, 342-351, 2012
182012
CO2 laser pulse shortening by laser ablation of a metal target
T Donnelly, M Mazoyer, A Lynch, G O’Sullivan, F O’Reilly, P Dunne, ...
Review of Scientific Instruments 83 (3), 2012
132012
Recent progress in source development for lithography at 6. x nm
G O'Sullivan, T Cummins, P Dunne, A Endo, P Hayden, T Higashiguchi, ...
Physica Scripta 2013 (T156), 014105, 2013
112013
Scaling of laser produced plasma UTA emission down to 3 nm for next generation lithography and short wavelength imaging
B Li, A Endo, T Otsuka, C O'Gorman, T Cummins, T Donnelly, D Kilbane, ...
Advances in X-Ray/EUV Optics and Components VI 8139, 217-225, 2011
102011
Laser produced plasma for efficient extreme ultraviolet light sources
T Donnelly, T Cummins, C O'Gorman, B Li, CS Harte, F O'Reilly, E Sokell, ...
AIP Conference Proceedings 1438 (1), 155-160, 2012
42012
Laser-produced plasma UTA emission in 3-7nm spectral region
T Higashiguchi, T Otsuka, N Yugami, W Jiang, A Endo, B Li, C O'Gorman, ...
Extreme Ultraviolet (EUV) Lithography III 8322, 757-765, 2012
12012
Studies of extreme ultraviolet emission from laser produced plasmas, as sources for next generation lithography
T Cummins
University College Dublin (Ireland), 2014
2014
Investigating the effects of laser intensity and pulse duration on 6.7-nm BEUV emission from Gadolinium plasma
T Cummins, T Otsuka, N Yugami, W Jiang, A Endo, B Li, C O'Gorman, ...
Short-Wavelength Imaging and Spectroscopy Sources 8678, 100-107, 2012
2012
Recent results on the development of extreme ultraviolet sources for lithography and metrology at 6. x nm
G O'Sullivan, L Bowen, P Dunne, T Otsuka, T Higashiguchi, N Yugami, ...
Journal of Physics: Conference Series 388 (15), 152020, 2012
2012
Shorter wavelength EUV source around 6. X nm by rare-earth plasma
T Otsuka, D Kilbane, T Cummins, C O'Gorman, P Dunne, G O'Sullivan, ...
Advances in X-Ray/EUV Optics and Components VI 8139, 248-257, 2011
2011
Optimisation of CO2 laser-produced Sn plasmas for next generation semiconductor lithography sources
T Cummins, M Mazoyer, G O’Sullivan, E Sokell, P Dunne, F O’Reilly, ...
2010
CO2 laser-produced tin plasmas for next generation semiconductor lithography sources
T Cummins, G O’Sullivan, E Sokell, P Dunne, F O’Reilly, P Sheridan, ...
2010
Time and Space Resolved Optical Plasma Diagnostics of Table-Top Scale Laser Produced Tin Plasmas
C Fallon, P Hayden, T Cummins, CO Gorman, E Sokell, GO Sullivan, ...
The system can't perform the operation now. Try again later.
Articles 1–18