Method for etching high dielectric constant materials and for cleaning deposition chambers for high dielectric constant materials B Ji, SA Motika, RM Pearlstein, EJ Karwacki Jr, D Wu US Patent 7,357,138, 2008 | 649 | 2008 |
Halogenated organoaminosilane precursors and methods for depositing films comprising same M Xiao, X Lei, ML O'neill, B Han, RM Pearlstein, H Chandra, HR Bowen, ... US Patent 8,993,072, 2015 | 477 | 2015 |
Passivating ALD reactor chamber internal surfaces to prevent residue buildup R Pearlstein, B Ji, S Motika US Patent App. 10/920,541, 2006 | 434 | 2006 |
Organoaminosilane precursors and methods for making and using same M Xiao, X Lei, B Han, ML O'neill, RM Pearlstein, R Ho, H Chandra, ... US Patent 9,005,719, 2015 | 412 | 2015 |
High temperature atomic layer deposition of silicon oxide thin films H Chandra, M Wang, M Xiao, X Lei, RM Pearlstein, ML O'neill, B Han US Patent 9,460,912, 2016 | 399 | 2016 |
Organoaminosilane precursors and methods for making and using same M Xiao, X Lei, B Han, ML O'neill, RM Pearlstein, R Ho, H Chandra, ... US Patent 8,771,807, 2014 | 388 | 2014 |
Compositions and processes for depositing carbon-doped silicon-containing films M Xiao, X Lei, RM Pearlstein, H Chandra, EJ Karwacki Jr, B Han, ... US Patent 9,447,287, 2016 | 250 | 2016 |
Solid state lithium cyanocobaltates with a high capacity for reversible dioxygen binding: Synthesis, reactivity, and structures D Ramprasad, GP Pez, BH Toby, TJ Markley, RM Pearlstein Journal of the American Chemical Society 117 (43), 10694-10701, 1995 | 131 | 1995 |
High gas storage capacities for ionic liquids through chemical complexation DJ Tempel, PB Henderson, JR Brzozowski, RM Pearlstein, H Cheng Journal of the American Chemical Society 130 (2), 400-401, 2008 | 98 | 2008 |
Alkene—glycol interconversion with technetium and rhenium oxo complexes RM Pearlstein, A Davison Polyhedron 7 (19-20), 1981-1989, 1988 | 68 | 1988 |
Reversible oxygen sorbent compositions D Ramprasad, GP Pez, RM Pearlstein, IK Meier US Patent 5,208,335, 1993 | 67 | 1993 |
Technetium-99 NMR spectroscopy: Chemical shift trends and long range coupling effects LA O'Connell, RM Pearlstein, A Davison, JR Thornback, JF Kronauge, ... Inorganica chimica acta 161 (1), 39-43, 1989 | 56 | 1989 |
zyxwvutsrqponm RM Pearlstein Inorganic Chemistry 28 (17), 3332-3334, 1989 | 56 | 1989 |
Atomic Layer Deposition of Silicon Dioxide Using Aminosilanes Di-sec-butylaminosilane and Bis(tert-butylamino)silane with Ozone LF Pena, CE Nanayakkara, A Mallikarjunan, H Chandra, M Xiao, X Lei, ... The Journal of Physical Chemistry C 120 (20), 10927-10935, 2016 | 54 | 2016 |
Structural Characterization of the Pseudoenantiomeric cis‐Dioxo Osmium(VI) Esters of Chiral Diols with Cinchona Alkaloid Ligands RM Pearlstein, BK Blackburn, WM Davis, KB Sharpless Angewandte Chemie International Edition in English 29 (6), 639-641, 1990 | 49 | 1990 |
First-Principles Study of a Full Cycle of Atomic Layer Deposition of SiO2 Thin Films with Di(sec-butylamino)silane and Ozone L Huang, B Han, B Han, A Derecskei-Kovacs, M Xiao, X Lei, ML O’Neill, ... The Journal of Physical Chemistry C 117 (38), 19454-19463, 2013 | 47 | 2013 |
Designing high performance precursors for atomic layer deposition of silicon oxide A Mallikarjunan, H Chandra, M Xiao, X Lei, RM Pearlstein, HR Bowen, ... Journal of Vacuum Science & Technology A 33 (1), 2015 | 42 | 2015 |
Density functional theory study on the full ALD process of silicon nitride thin film deposition via BDEAS or BTBAS and NH 3 L Huang, B Han, B Han, A Derecskei-Kovacs, M Xiao, X Lei, ML O'Neill, ... Physical Chemistry Chemical Physics 16 (34), 18501-18512, 2014 | 36 | 2014 |
Polyfluorinated boron cluster-based salts: A new electrolyte for application in Li4Ti5O12/LiMn2O4 rechargeable lithium-ion batteries CM Ionica-Bousquet, D Muñoz-Rojas, WJ Casteel, RM Pearlstein, ... Journal of Power Sources 195 (5), 1479-1485, 2010 | 36 | 2010 |
Ionic liquid based mixtures for gas storage and delivery DJ Tempel, PB Henderson, JR Brzozowski, RM Pearlstein, D Garg US Patent 7,563,308, 2009 | 35 | 2009 |