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Peter Gilgunn
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Chronic tissue response to carboxymethyl cellulose based dissolvable insertion needle for ultra-small neural probes
TDY Kozai, Z Gugel, X Li, PJ Gilgunn, R Khilwani, OB Ozdoganlar, ...
Biomaterials 35 (34), 9255-9268, 2014
1992014
An ultra-compliant, scalable neural probe with molded biodissolvable delivery vehicle
PJ Gilgunn, R Khilwani, TDY Kozai, DJ Weber, XT Cui, G Erdos, ...
2012 IEEE 25th international conference on micro electro mechanical systems …, 2012
772012
CMOS–MEMS lateral electrothermal actuators
PJ Gilgunn, J Liu, N Sarkar, GK Fedder
Journal of Microelectromechanical Systems 17 (1), 103-114, 2008
772008
Ultra-miniature ultra-compliant neural probes with dissolvable delivery needles: design, fabrication and characterization
R Khilwani, PJ Gilgunn, TDY Kozai, XC Ong, E Korkmaz, PK Gunalan, ...
Biomedical microdevices 18, 1-20, 2016
542016
Structural analysis of explanted microelectrode arrays
PJ Gilgunn, XC Ong, SN Flesher, AB Schwartz, RA Gaunt
2013 6th International IEEE/EMBS Conference on Neural Engineering (NER), 719-722, 2013
352013
Flip-chip integrated SOI-CMOS-MEMS fabrication technology
PJ Gilgunn, GK Fedder
Tech. Dig. Solid-State Sensors, Actuators and Microsystems Workshop, 10-13, 2008
202008
Fabrication, methods, apparatuses, and systems for ultra-compliant probes for neural and other tissues
GK Fedder, B Ozdoganlar, PJ Gilgunn
US Patent 9,241,651, 2016
132016
Apparatus and method for implantation of devices into soft tissue
PJ Gilgunn, OB Ozdoganlar, TDY Kozai, G Fedder, X Cui, DJ Weber
US Patent 9,408,571, 2016
122016
On the origin of selectivity and anisotropy loss during microstructure release etch
PJ Gilgunn, GK Fedder
Journal of Micromechanics and Microengineering 20 (3), 035021, 2010
112010
A CMOS-MEMS rotary microactuator suitable for hard disk drive applications
WC Messner, JA Bain, M Koenders, J Groenesteijn, GH Marsman, ...
TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009
92009
Modulation of Parylene-C to silicon adhesion using HMDS priming
XC Ong, GK Fedder, PJ Gilgunn
Journal of Micromechanics and Microengineering 24 (10), 105001, 2014
72014
Ultra-compliant neural probes are subject to fluid forces during dissolution of polymer delivery vehicles
WFH Rakuman, XC Ong, HS Tetikol, R Khilwani, XT Cui, OB Ozdoganlar, ...
2013 35th Annual International Conference of the IEEE Engineering in …, 2013
72013
SOI-CMOS-MEMS electrothermal micromirror arrays
PJ Gilgunn
Carnegie Mellon University, 2010
72010
Model for aspect ratio dependent etch modulated processing
PJ Gilgunn, JF Alfaro, GK Fedder
Journal of Vacuum Science & Technology A 28 (2), 334-346, 2010
52010
A high-speed, bimodal, CMOS-MEMS resonant scanner driven by temperature-gradient actuators
S Camacho-León, PJ Gilgunn, SO Martínez-Chapa, GK Fedder
MOEMS and Miniaturized Systems XI 8252, 242-251, 2012
32012
Large angle micro-mirror arrays in CMOS-MEMS
PJ Gilgunn
MS Report, Electrical and Computer Engineering Dept., Carnegie Mellon University, 2006
32006
Mechanisms of process-induced heating of MEMS structures during plasma release etch
PJ Gilgunn, GK Fedder
2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems …, 2010
22010
Aspect ratio dependent etch modulation for CMOS-MEMS applications
PJ Gilgunn, JF Alfaro, GK Fedder
TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009
22009
System-Level Modeling of MEMS
GK Fedder, C Hierold, JG Korvink, O Tabata, O Brand
John Wiley & Sons, Limited, 2013
12013
Apparatus and method for implantation of devices into soft tissue
PJ Gilgunn, OB Ozdoganlar, TDY Kozai, G Fedder, X Cui, DJ Weber
US Patent 10,350,021, 2019
2019
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Articles 1–20