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Shantanu Tripathi
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Copper CMP modeling: millisecond scale adsorption kinetics of BTA in glycine-containing solutions at pH 4
S Choi, S Tripathi, DA Dornfeld, FM Doyle
Journal of The Electrochemical Society 157 (12), H1153, 2010
342010
Strategies for burr minimization and cleanability in aerospace and automotive manufacturing
MC Avila, JD Gardner, C Reich-Weiser, A Vijayaraghavan, D Dornfeld
SAE Transactions Journal of Aerospace 114 (1), 2006
322006
Review of geometric solutions for milling burr prediction and minimization
S Tripathi, DA Dornfeld
Proceedings of the Institution of Mechanical Engineers, Part B: Journal of …, 2006
242006
Fundamental mechanisms of copper CMP–passivation kinetics of copper in CMP Slurry Constituents
S Tripathi, FM Doyle, DA Dornfeld
MRS Online Proceedings Library (OPL) 1157, 1157-E06-02, 2009
152009
Integrated tribo-chemical modeling of copper CMP
S Tripathi, S Choi, FM Doyle, DA Dornfeld
MRS Online Proceedings Library (OPL) 1157, 1157-E02-03, 2009
132009
Burr minimization strategies and cleanability in the aerospace and automotive industry
M Avila, J Gardner, C Reich-Weiser, A Vijayaraghavan, S Tripathi, ...
SAE Transactions Journal of Aerospace 114 (1), 1073-1082, 2005
112005
Tribo-chemical mechanisms of copper chemical mechanical planarization (CMP)-Fundamental investigations and integrated modeling
S Tripathi
University of California, Berkeley, 2008
62008
Chip Scale Prediction of Nitride Erosion in High Selectivity STI CMP
J Choi, S Tripathi, DA Hansen, D Dornfeld
62006
Chip scale prediction of nitride erosion in high selective STI CMP
J Choi, S Tripathi, D Hansen, DA Dornfeld
2006 CMP-MIC Conference, 160-167, 2006
52006
CMP Modeling as a part of Design for Manufacturing
S Tripathi, A Monvoisin, D Dornfeld, FM Doyle
International Conference on Planarization/CMP Technology, 1-6, 2007
42007
Tribo-chemical modeling of copper CMP
S Tripathi, F Doyle, D Dornfeld
32006
Integrated tribo-chemical modeling of copper CMP
S Choi, S Tripathi, FM Doyle, DA Dornfeld
Mater. Res. Soc. Symp. Proc. 1157, E02–E03, 2009
22009
Jim Evans: A Reflection on his Impact
F Doyle
Minerals, Metals and Materials Society/AIME, 420 Commonwealth Dr., P. O. Box …, 2010
2010
Fundamental Mechanisms of Copper CMP–Passivation Kinetics of Copper in CMP Slurry
S Tripathi, FM Doyle, D Dornfeld
2009
IMPACT
S Tripathi, FM Doyle, D Dornfeld
2008
CMP Modeling as a part of Design for Manufacturing
D Dornfeld, S Tripathi, A Monvoisin, FM Doyle, DA Dornfeld
2007
Tool Path Planning for Reconfigurable Machines
S Tripathi, DA Dornfeld
2005
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