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Brent Sperling
Brent Sperling
EMD Electronics
Verified email at emdgroup.com
Title
Cited by
Cited by
Year
Toward clean and crackless transfer of graphene
X Liang, BA Sperling, I Calizo, G Cheng, CA Hacker, Q Zhang, Y Obeng, ...
ACS nano 5 (11), 9144-9153, 2011
10042011
Anomalously high thermal conductivity of amorphous Si deposited by hot-wire chemical vapor deposition
HS Yang, DG Cahill, X Liu, JL Feldman, RS Crandall, BA Sperling, ...
Physical Review B 81 (10), 104203, 2010
892010
In situ spectroscopic ellipsometry analyses of hafnium diboride thin films deposited by single-source chemical vapor deposition
Y Yang, S Jayaraman, B Sperling, DY Kim, GS Girolami, JR Abelson
Journal of Vacuum Science & Technology A 25 (1), 200-206, 2007
362007
Simultaneous short-range smoothening and global roughening during growth of hydrogenated amorphous silicon films
BA Sperling, JR Abelson
Applied physics letters 85 (16), 3456-3458, 2004
362004
Reflection absorption infrared spectroscopy during atomic layer deposition of HfO2 films from tetrakis (ethylmethylamido) hafnium and water
BA Sperling, WA Kimes, JE Maslar
Applied surface science 256 (16), 5035-5041, 2010
302010
Theory of light scattering from self-affine surfaces: Relationship between surface morphology and effective medium roughness
A Yanguas-Gil, BA Sperling, JR Abelson
Physical Review B 84 (8), 085402, 2011
292011
Reproducible Performance Improvements to Monolayer MoS2 Transistors through Exposed Material Forming Gas Annealing
NB Guros, ST Le, S Zhang, BA Sperling, JB Klauda, CA Richter, ...
ACS applied materials & interfaces 11 (18), 16683-16692, 2019
282019
Carbon scrolls from chemical vapor deposition grown graphene
G Cheng, I Calizo, X Liang, BA Sperling, AC Johnston-Peck, W Li, ...
Carbon 76, 257-265, 2014
282014
Atomic Layer Deposition of Al2O3 Using Trimethylaluminum and H2O: The Kinetics of the H2O Half-Cycle
BA Sperling, B Kalanyan, JE Maslar
The Journal of Physical Chemistry C 124 (5), 3410-3420, 2020
212020
In Situ Time-Resolved Attenuated Total Reflectance Infrared Spectroscopy for Probing Metal–Organic Framework Thin Film Growth
J Zhao, B Kalanyan, HF Barton, BA Sperling, GN Parsons
Chemistry of Materials 29 (20), 8804-8810, 2017
202017
Time-resolved surface infrared spectroscopy during atomic layer deposition
BA Sperling, J Hoang, WA Kimes, JE Maslar
Applied spectroscopy 67 (9), 1003-1012, 2013
192013
Time-resolved Fourier transform infrared spectroscopy of the gas phase during atomic layer deposition
BA Sperling, WA Kimes, JE Maslar, PM Chu
Journal of Vacuum Science & Technology A 28 (4), 613-621, 2010
172010
Kinetic roughening of amorphous silicon during hot-wire chemical vapor deposition at low temperature
BA Sperling, JR Abelson
Journal of applied physics 101 (2), 2007
172007
Band Offset and Electron Affinity of Monolayer MoSe2 by Internal Photoemission
Q Zhang, S Zhang, BA Sperling, NV Nguyen
Journal of Electronic Materials 48, 6446-6450, 2019
162019
Time-resolved surface infrared spectroscopy during atomic layer deposition of TiO2 using tetrakis (dimethylamido) titanium and water
BA Sperling, J Hoang, WA Kimes, JE Maslar, KL Steffens, NV Nguyen
Journal of Vacuum Science & Technology A 32 (3), 2014
162014
Hydrogen-induced modification of the medium-range structural order in amorphous silicon films
LN Nittala, S Jayaraman, BA Sperling, JR Abelson
Applied Physics Letters 87 (24), 2005
152005
Quantitative infrared spectroscopy of tetrakis (dimethylamido) titanium for process measurements
BA Sperling, WA Kimes, JE Maslar
ECS Journal of Solid State Science and Technology 3 (3), P26, 2014
102014
In Situ Gas-Phase Diagnostics for Titanium Nitride Atomic Layer Deposition
JE Maslar, W Kimes, B Sperling
ECS Transactions 41 (2), 157, 2011
102011
In Situ gas phase measurements during metal alkylamide atomic layer deposition
JE Maslar, WA Kimes, BA Sperling
Journal of Nanoscience and Nanotechnology 11 (9), 8226-8232, 2011
82011
Nonvolatile memory based on redox-active ruthenium molecular monolayers
K Jiang, SJ Pookpanratana, T Ren, SN Natoli, BA Sperling, J Robertson, ...
Applied Physics Letters 115 (16), 2019
72019
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