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Fan Tu
Fan Tu
R&D Mask repair, Carl Zeiss SMT; Friedrich-Alexander-Universität Erlangen-Nürnberg
Verified email at zeiss.com - Homepage
Title
Cited by
Cited by
Year
Surface-anchored metal–organic frameworks as versatile resists for gas-assisted e-beam lithography: Fabrication of sub-10 nanometer structures
M Drost, F Tu, L Berger, C Preischl, W Zhou, H Gliemann, C Wöll, ...
ACS nano 12 (4), 3825-3835, 2018
392018
Hungry Porphyrins: Protonation and Self‐Metalation of Tetraphenylporphyrin on TiO2 (110)‐1× 1
J Köbl, T Wang, C Wang, M Drost, F Tu, Q Xu, H Ju, D Wechsler, M Franke, ...
ChemistrySelect 1 (19), 6103-6105, 2016
322016
Electron-beam induced deposition and autocatalytic decomposition of Co (CO) 3NO
F Vollnhals, M Drost, F Tu, E Carrasco, A Späth, RH Fink, HP Steinrück, ...
Beilstein journal of nanotechnology 5 (1), 1175-1185, 2014
292014
Region‐Selective Deposition of Core–Shell Nanoparticles for 3 D Hierarchical Assemblies by the Huisgen 1, 3‐Dipolar Cycloaddition
SH Etschel, L Portilla, J Kirschner, M Drost, F Tu, H Marbach, ...
Angewandte Chemie International Edition 54 (32), 9235-9238, 2015
262015
On the Principles of Tweaking nanostructure fabrication via focused electron beam induced processing combined with catalytic growth processes
M Drost, F Tu, F Vollnhals, I Szenti, J Kiss, H Marbach
Small Methods 1 (6), 1700095, 2017
102017
On the magnetic properties of iron nanostructures fabricated via focused electron beam induced deposition and autocatalytic growth processes
F Tu, M Drost, F Vollnhals, A Späth, E Carrasco, RH Fink, H Marbach
Nanotechnology 27 (35), 355302, 2016
102016
4 英寸 VGFGaAs 单晶生长的数值模拟与实验研究
丁国强, 苏小平, 屠海令, 张峰燚, 涂凡
稀有金属 33 (2), 211, 2009
92009
Exploring the fabrication of Co and Mn nanostructures with focused soft X-ray beam induced deposition
F Tu, A Späth, M Drost, F Vollnhals, S Krick Calderon, RH Fink, ...
Journal of Vacuum Science & Technology B, Nanotechnology and …, 2017
82017
VGF 法 GaAs 单晶位错分布的数值模拟和 Raman 光谱研究
涂凡, 苏小平, 屠海令, 张峰燚, 丁国强, 王思爱
稀有金属 2, 237-242, 2010
82010
Additive fabrication of nanostructures with focused soft X-rays
A Späth, F Tu, F Vollnhals, M Drost, SK Calderón, B Watts, RH Fink, ...
RSC advances 6 (100), 98344-98349, 2016
62016
Pushing the limits of EUV mask repair: addressing sub-10 nm defects with the next generation e-beam-based mask repair tool
T Heil, M Waldow, R Capelli, H Schneider, L Ahmels, F Tu, J Schöneberg, ...
Journal of Micro/Nanopatterning, Materials, and Metrology 20 (3), 031013, 2021
42021
High-end EUV photomask repairs for 5nm technology and beyond
H Schneider, F Tu, L Ahmels, B Szafranek, K Gries, D Rhinow, S Vollmar, ...
Photomask Technology 2020 11518, 1151808, 2020
42020
VGF 法生长 4 英寸 GaAs 单晶固液界面形状和热应力的数值模拟研究
涂凡, 苏小平, 张峰燚, 黎建明, 丁国强, 王思爱
稀有金属 35 (3), 388-393, 2011
42011
数字模拟法研究坩埚锥角对 VGF 法 GaAs 单晶生长的影响
王思爱, 苏小平, 张峰燚, 丁国强, 涂凡
稀有金属 35 (004), 525-530, 2011
32011
SEM AutoAnalysis for reduced turnaround time and to ensure repair quality of EUV photomasks
K Egodage, F Tu, H Schneider, CF Hermanns, G Kersteen, B Szafranek, ...
International Conference on Extreme Ultraviolet Lithography 2019 11147, 156-165, 2019
22019
6 英寸砷化镓单晶 VGF 法生长中坩埚-埚托间隙对晶体生长过程影响
涂凡, 苏小平, 张峰燚, 黎建明, 丁国强
稀有金属 35 (4), 617-622, 2011
22011
Focused soft X-ray beam induced deposition: Recent advances to a novel approach for fabrication of metallic nanostructures
A Spath, F Vollnhals, F Tu, KC Prince, R Richter, J Raabe, H Marbach, ...
Microscopy and Microanalysis 24 (S2), 114-115, 2018
12018
Localized growth of carbon nanotubes via lithographic fabrication of metallic deposits
F Tu, M Drost, I Szenti, J Kiss, Z Kónya, H Marbach
Beilstein journal of nanotechnology 8 (1), 2592-2605, 2017
12017
10cm VGF 法 GaAs 单晶生长过程中热应力的数值模拟
涂凡, 苏小平, 屠海令, 张峰燚, 丁国强, 王思爱
红外与激光工程 3, 2010
12010
Photomask
H Schneider, F Tu, L Ahmels, B Szafranek, K Gries, D Rhinow, S Vollmar, ...
2021
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