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Dr. Vilas S. Patil
Dr. Vilas S. Patil
Marie Curie Fellow Tyndall Nation Institute Cork Ireland
Verified email at tyndall.ie - Homepage
Title
Cited by
Cited by
Year
HfO2 gate dielectric on Ge (1 1 1) with ultrathin nitride interfacial layer formed by rapid thermal NH3 treatment
KS Agrawal, VS Patil, AG Khairnar, AM Mahajan
Applied Surface Science 364, 747-751, 2016
212016
Structural and electrical properties of ultra-thin high-k ZrO2 film on nitride passivated Ge (100) prepared by PEALD
VS Patil, KS Agrawal, AG Khairnar, BJ Thibeault, AM Mahajan
Materials Science in Semiconductor Processing 56, 277-281, 2016
182016
XPS study of homemade plasma enhanced atomic layer deposited La2O3/ZrO2 bilayer thin films
V Patil, K Agrawal, V Barhate, S Patil, A Mahajan
Semiconductor Science and Technology 34 (3), 034004, 2019
152019
High-temperature Josephson diode
S Ghosh, V Patil, A Basu, Kuldeep, A Dutta, DA Jangade, R Kulkarni, ...
Nature Materials, 1-7, 2024
122024
Preparation of rare earth CeO2 thin films using metal organic decomposition method for metal-oxide–semiconductor capacitors
KS Agrawal, VS Patil, AG Khairnar, AM Mahajan
Journal of Materials Science: Materials in Electronics 28, 12503-12508, 2017
122017
The effect of post-deposition annealing on the chemical, structural and electrical properties of Al/ZrO2/La2O3/ZrO2/Al high-k nanolaminated MIM capacitors
SR Patil, VN Barhate, VS Patil, KS Agrawal, AM Mahajan
Journal of Materials Science: Materials in Electronics 33 (14), 11227-11235, 2022
92022
Post-deposition-annealed lanthanum-doped cerium oxide thin films: structural and electrical properties
VN Barhate, KS Agrawal, VS Patil, AM Mahajan
Rare Metals 40 (7), 1835-1843, 2021
92021
Spectroscopic study of La2O3 thin films deposited by indigenously developed plasma-enhanced atomic layer deposition system
V Barhate, K Agrawal, V Patil, S Patil, A Mahajan
International Journal of Modern Physics B 32 (19), 1840074, 2018
92018
Atomic layer deposited HfO2 ultra-thin films on different crystallographic orientation Ge for CMOS applications
KS Agrawal, VS Patil, AM Mahajan
Thin Solid Films 654, 30-37, 2018
72018
Analysis of negative bias illumination stress induced effect on LTPS and a-IGZO TFT
KS Agrawal, VS Patil, EC Cho, J Yi
ECS Journal of Solid State Science and Technology 9 (10), 106005, 2020
62020
Plasma-enhanced atomic layer-deposited La2O3 ultra-thin films on Si and 6H–SiC: a comparative study
KS Agrawal, VN Barhate, VS Patil, LS Patil, AM Mahajan
Applied Physics A 126, 1-10, 2020
62020
High mobility field-effect transistors based on MoS2 crystals grown by the flux method
V Patil, J Kim, K Agrawal, T Park, J Yi, N Aoki, K Watanabe, T Taniguchi, ...
Nanotechnology 32 (32), 325603, 2021
52021
Performance enhancement of Al/La2O3/ZrO2/4H–SiC MOS device with LaON as interfacial passivation layer
VN Barhate, KS Agrawal, VS Patil, SR Patil, AM Mahajan
Materials Science in Semiconductor Processing 117, 105161, 2020
42020
Interfacial and electrical properties of Al2O3/HfO2 bilayer deposited by atomic layer deposition on GeON passivated germanium surface
VS Patil, KS Agrawal, AG Khairnar, BJ Thibeault, AM Mahajan
Materials Research Bulletin 87, 208-213, 2017
42017
Investigation of asymmetric degradation in electrical properties of a-InGaZnO thin-film transistor arrays as a function of channel width-to-length aspect ratio
K Agrawal, V Patil, GT Chavan, G Yoon, J Kim, J Park, S Pae, JS Kim, ...
Journal of Materials Science: Materials in Electronics 31, 9826-9834, 2020
32020
Temperature-dependent study of slow traps generation mechanism in HfO2/GeON/Ge (1 1 0) metal oxide semiconductor devices
K Agrawal, V Patil, V Barhate, G Yoon, YJ Lee, A Mahajan, J Yi
Solid-State Electronics 167, 107797, 2020
22020
Improvement in Electrical Properties of A1/La2O3/ZrO2/ Gate Stack Deposited on LaON Passivated GaAs Substrate
AMM VN Barhate, KS Agrawal, VS Patil
4th IEEE Electron Devices Technology & Manufacturing Conference (EDTM),, 1-4, 2020
12020
PEALD grown high-k ZrO2 thin films on SiC group IV compound semiconductor
AG Khairnar, VS Patil, KS Agrawal, RS Salunke, AM Mahajan
Semiconductors 51, 131-133, 2017
12017
Similarity Measurement using Shape Feature for Image Retrieval
SR Patil, VS Patil
International Conference on Global Trends in Engineering, Technology and …, 2016
12016
Investigation of Current Conduction Mechanism in HfO2 Thin Film on Silicon Substrate
AG Khairnar, KS Agrawal, VS Patil, AM Mahajan
Physics of Semiconductor Devices: 17th International Workshop on the Physics …, 2014
12014
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