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Simon Ruffell
Simon Ruffell
Applied Materials - Varian Semiconductor Equipment
Verified email at amat.com
Title
Cited by
Cited by
Year
Formation and growth of nanoindentation-induced high pressure phases in crystalline and amorphous silicon
S Ruffell, JE Bradby, JS Williams, P Munroe
Journal of Applied Physics 102 (6), 2007
922007
An in situ electrical measurement technique via a conducting diamond tip for nanoindentation in silicon
S Ruffell, JE Bradby, JS Williams, OL Warren
Journal of Materials Research 22 (3), 578-586, 2007
822007
High pressure crystalline phase formation during nanoindentation: amorphous versus crystalline silicon
S Ruffell, JE Bradby, JS Williams
Applied physics letters 89 (9), 2006
782006
Phase transformations induced by spherical indentation in ion-implanted amorphous silicon
B Haberl, JE Bradby, S Ruffell, JS Williams, P Munroe
Journal of applied physics 100 (1), 2006
782006
Identification of nanoindentation-induced phase changes in silicon by in situ electrical characterization
S Ruffell, JE Bradby, N Fujisawa, JS Williams
Journal of Applied Physics 101 (8), 2007
742007
Electron and hole mobility reduction and Hall factor in phosphorus-compensated p-type silicon
FE Rougieux, D Macdonald, A Cuevas, S Ruffell, J Schmidt, B Lim, ...
Journal of Applied Physics 108 (1), 2010
702010
Nanoindentation-induced phase transformations in silicon at elevated temperatures
S Ruffell, JE Bradby, JS Williams, D Munoz-Paniagua, S Tadayyon, ...
Nanotechnology 20 (13), 135603, 2009
682009
Annealing of nanoindentation-induced high pressure crystalline phases created in crystalline and amorphous silicon
S Ruffell, B Haberl, S Koenig, JE Bradby, JS Williams
Journal of Applied Physics 105 (9), 2009
562009
Annealing behavior of low-energy ion-implanted phosphorus in silicon
S Ruffell, IV Mitchell, PJ Simpson
Journal of applied physics 97 (12), 2005
472005
Structural characterization of pressure-induced amorphous silicon
B Haberl, ACY Liu, JE Bradby, S Ruffell, JS Williams, P Munroe
Physical Review B 79 (15), 155209, 2009
462009
Influence of oxygen on the sputtering of aluminum oxide for the surface passivation of crystalline silicon
TTA Li, S Ruffell, M Tucci, Y Mansoulié, C Samundsett, S De Iullis, ...
Solar energy materials and solar cells 95 (1), 69-72, 2011
442011
Nanoindentation-induced phase transformation in crystalline silicon and relaxed amorphous silicon
R Rao, JE Bradby, S Ruffell, JS Williams
Microelectronics journal 38 (6-7), 722-726, 2007
442007
Nanomechanical properties of sputter-deposited HfO2 and HfxSi1-xO2 thin films
DK Venkatachalam, JE Bradby, MN Saleh, S Ruffell, RG Elliman
Journal of Applied Physics 110 (4), 2011
422011
Understanding pressure-induced phase-transformation behavior in silicon through in situ electrical probing under cyclic loading conditions
N Fujisawa, S Ruffell, JE Bradby, JS Williams, B Haberl, OL Warren
Journal of Applied Physics 105 (10), 2009
402009
Experimental evidence for semiconducting behavior of Si-XII
S Ruffell, K Sears, AP Knights, JE Bradby, JS Williams
Physical Review B 83 (7), 075316, 2011
392011
Room temperature writing of electrically conductive and insulating zones in silicon by nanoindentation
S Ruffell, K Sears, JE Bradby, JS Williams
Applied Physics Letters 98 (5), 2011
382011
Techniques for forming angled structures for reduced defects in heteroepitaxy of semiconductor films
S Srinivasan, FA Khaja, S Ruffell, J Hautala
US Patent 9,287,123, 2016
342016
Nanoscale characterization of energy generation from piezoelectric thin films
M Bhaskaran, S Sriram, S Ruffell, A Mitchell
Advanced Functional Materials 21 (12), 2251-2257, 2011
332011
Annealing kinetics of nanoindentation-induced polycrystalline high pressure phases in crystalline silicon
S Ruffell, JE Bradby, JS Williams
Applied physics letters 90 (13), 2007
282007
Effects of carbon on ion-implantation-induced disorder in GaN
SO Kucheyev, JE Bradby, CP Li, S Ruffell, T van Buuren, TE Felter
Applied Physics Letters 91 (26), 2007
272007
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