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Hirotaka Hida
Hirotaka Hida
Associate Professor, Kobe University, Japan
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Comparison of effective transverse piezoelectric coefficients e31, f of Pb (Zr, Ti) O3 thin films between direct and converse piezoelectric effects
Y Tsujiura, S Kawabe, F Kurokawa, H Hida, I Kanno
Japanese Journal of Applied Physics 54 (10S), 10NA04, 2015
882015
Surfactant Adsorption on Single-Crystal Silicon Surfaces in TMAH Solution: Orientation-Dependent Adsorption Detected by In Situ Infrared Spectroscopy
P Pal, K Sato, MA Gosalvez, Y Kimura, KI Ishibashi, M Niwano, H Hida, ...
Journal of microelectromechanical systems 18 (6), 1345-1356, 2009
722009
Lead-free piezoelectric MEMS energy harvesters of (K, Na) NbO3 thin films on stainless steel cantilevers
Y Tsujiura, E Suwa, F Kurokawa, H Hida, K Suenaga, K Shibata, I Kanno
Japanese Journal of Applied Physics 52 (9S1), 09KD13, 2013
642013
Experimental procurement of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples
MA Gosalvez, P Pal, N Ferrando, H Hida, K Sato
Journal of Micromechanics and Microengineering 21 (12), 125007, 2011
502011
Fabrication of novel microstructures based on orientation-dependent adsorption of surfactant molecules in a TMAH solution
P Pal, K Sato, MA Gosalvez, B Tang, H Hida, M Shikida
Journal of Micromechanics and Microengineering 21 (1), 015008, 2010
492010
Fabrication of a quartz tuning-fork probe with a sharp tip for AFM systems
H Hida, M Shikida, K Fukuzawa, S Murakami, K Sato, K Asaumi, Y Iriye, ...
Sensors and Actuators A: Physical 148 (1), 311-318, 2008
442008
Assembly of skeletal muscle cells on a Si-MEMS device and their generative force measurement
K Shimizu, H Sasaki, H Hida, H Fujita, K Obinata, M Shikida, E Nagamori
Biomedical microdevices 12, 247-252, 2010
392010
Airflow energy harvester of piezoelectric thin-film bimorph using self-excited vibration
Y Tsujiura, E Suwa, T Nishi, F Kurokawa, H Hida, I Kanno
Sensors and Actuators A: Physical 261, 295-301, 2017
382017
Crystallographic contributions to piezoelectric properties in PZT thin films
G Tan, K Maruyama, Y Kanamitsu, S Nishioka, T Ozaki, T Umegaki, ...
Scientific Reports 9 (1), 7309, 2019
352019
Chemotaxis assay of plant-parasitic nematodes on a gel-filled microchannel device
H Hida, H Nishiyama, S Sawa, T Higashiyama, H Arata
Sensors and Actuators B: Chemical 221, 1483-1491, 2015
282015
Study of surfactant-added TMAH for applications in DRIE and wet etching-based micromachining
B Tang, M Shikida, K Sato, P Pal, H Amakawa, H Hida, K Fukuzawa
Journal of Micromechanics and Microengineering 20 (6), 065008, 2010
232010
Fabrication of high-efficiency piezoelectric energy harvesters of epitaxial Pb (Zr, Ti) O3 thin films by laser lift-off
E Suwa, Y Tsujiura, F Kurokawa, H Hida, I Kanno
Energy Harvesting and Systems 3 (1), 61-67, 2016
202016
Reliability of vibration energy harvesters of metal-based PZT thin films
Y Tsujiura, E Suwa, F Kurokawa, H Hida, I Kanno
Journal of Physics: Conference Series 557 (1), 012096, 2014
192014
Anisotropic etching on Si {1 1 0}: Experiment and simulation for the formation of microstructures with convex corners
P Pal, MA Gosalvez, K Sato, H Hida, Y Xing
Journal of Micromechanics and Microengineering 24 (12), 125001, 2014
192014
Transparent piezoelectric thin-film devices: Pb (Zr, Ti) O3 thin films on glass substrates
K Ueda, SH Kweon, H Hida, Y Mukouyama, I Kanno
Sensors and Actuators A: Physical 327, 112786, 2021
162021
Electromechanical properties of BaTiO3-xBaSnO3 thin films prepared via combinatorial sputtering
H Cheng, H Hida, J Ouyang, I Kanno
Ceramics International 43 (1), 1597-1601, 2017
142017
Simple millimeter-scale robot using Pb (Zr, Ti) piezoelectric thin film actuator on titanium substrate
H Hida, Y Morita, F Kurokawa, Y Tsujiura, I Kanno
Microsystem Technologies 22, 1429-1436, 2016
132016
Compositional dependence of Ba (Zr0. 2Ti0. 8) O3–(Ba0. 7Ca0. 3) TiO3 piezoelectric thin films prepared by combinatorial sputtering
F Kurokawa, A Mori, Y Tsujiura, H Hida, I Kanno
Thin Solid Films 588, 34-38, 2015
132015
Compositional dependence of Pb (Mg1/3, Nb2/3) O3–PbTiO3 piezoelectric thin films by combinatorial sputtering
F Kurokawa, Y Tsujiura, H Hida, I Kanno
Japanese Journal of Applied Physics 53 (9S), 09PA06, 2014
132014
Micro fabrication of lead-free (K, Na) NbO3 piezoelectric thin films by dry etching
F Kurokawa, R Yokokawa, H Kotera, F Horikiri, K Shibata, T Mishima, ...
Micro & Nano Letters 7 (12), 1223-1225, 2012
112012
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