Follow
Michael J. Maher
Michael J. Maher
3M
Verified email at utexas.edu
Title
Cited by
Cited by
Year
Block copolymer lithography
CM Bates, MJ Maher, DW Janes, CJ Ellison, CG Willson
Macromolecules 47 (1), 2-12, 2014
6472014
Polarity-Switching Top Coats Enable Orientation of Sub–10-nm Block Copolymer Domains
CM Bates, T Seshimo, MJ Maher, WJ Durand, JD Cushen, LM Dean, ...
Science 338 (6108), 775-779, 2012
4402012
Design of high‐χ block copolymers for lithography
WJ Durand, G Blachut, MJ Maher, S Sirard, S Tein, MC Carlson, Y Asano, ...
Journal of Polymer Science Part A: Polymer Chemistry 53 (2), 344-352, 2015
1672015
Interfacial Design for Block Copolymer Thin Films
MJ Maher, CM Bates, G Blachut, S Sirard, JL Self, MC Carlson, LM Dean, ...
Chemistry of Materials 26 (3), 1471-1479, 2014
1282014
Directed Self-Assembly and Pattern Transfer of Five Nanometer Block Copolymer Lamellae
AP Lane, XM Yang, MJ Maher, G Blachut, Y Asano, Y Someya, ...
ACS nano 11 (8), 7656-7665, 2017
1152017
Consequences of Grafting Density on the Linear Viscoelastic Behavior of Graft Polymers
IN Haugan, MJ Maher, AB Chang, TP Lin, RH Grubbs, MA Hillmyer, ...
ACS Macro Letters 7 (5), 525-530, 2018
1072018
Directed Self-Assembly of Silicon-Containing Block Copolymer Thin Films
MJ Maher, CT Rettner, CM Bates, G Blachut, MC Carlson, WJ Durand, ...
ACS applied materials & interfaces 7 (5), 3323-3328, 2015
812015
Double-Patterned Sidewall Directed Self-Assembly and Pattern Transfer of Sub-10 nm PTMSS-b-PMOST
J Cushen, L Wan, G Blachut, MJ Maher, TR Albrecht, CJ Ellison, ...
ACS applied materials & interfaces 7 (24), 13476-13483, 2015
702015
Structure, Stability, and Reorganization of 0.5 L0 Topography in Block Copolymer Thin Films
MJ Maher, JL Self, P Stasiak, G Blachut, CJ Ellison, MW Matsen, ...
ACS nano 10 (11), 10152-10160, 2016
402016
Physical Aging of Polylactide-Based Graft Block Polymers
IN Haugan, B Lee, MJ Maher, A Zografos, HJ Schibur, SD Jones, ...
Macromolecules 52 (22), 8878-8894, 2019
372019
Experimental and modeling study of domain orientation in confined block copolymer thin films
WJ Durand, MC Carlson, MJ Maher, G Blachut, LJ Santos, S Tein, ...
Macromolecules 49 (1), 308-316, 2016
372016
A hybrid chemo-/grapho-epitaxial alignment strategy for defect reduction in sub-10 nm directed self-assembly of silicon-containing block copolymers
G Blachut, SM Sirard, MJ Maher, Y Asano, Y Someya, AP Lane, ...
Chemistry of Materials 28 (24), 8951-8961, 2016
362016
Characterizing the Interface Scaling of High χ Block Copolymers near the Order–Disorder Transition
DF Sunday, MJ Maher, AF Hannon, CD Liman, S Tein, G Blachut, ...
Macromolecules 51 (1), 173-180, 2018
332018
Photopatternable Interfaces for Block Copolymer Lithography
MJ Maher, CM Bates, G Blachut, MC Carlson, JL Self, DW Janes, ...
ACS Macro Letters 3 (8), 824-828, 2014
302014
Pattern Transfer of Sub-10 nm Features via Tin-Containing Block Copolymers
MJ Maher, K Mori, SM Sirard, AM Dinhobl, CM Bates, E Gurer, G Blachut, ...
ACS Macro Letters 5, 391-395, 2016
292016
Photopatterning of Block Copolymer Thin Films
AP Lane, MJ Maher, CG Willson, CJ Ellison
ACS Macro Letters 5 (4), 460-465, 2016
262016
High chi block copolymer DSA to improve pattern quality for FinFET device fabrication
HY Tsai, H Miyazoe, A Vora, T Magbitang, N Arellano, CC Liu, MJ Maher, ...
Advances in Patterning Materials and Processes XXXIII 9779, 977910, 2016
222016
Block copolymer orientation control using a top-coat surface treatment
T Seshimo, CM Bates, LM Dean, JD Cushen, WJ Durand, MJ Maher, ...
Journal of Photopolymer Science and Technology 25 (1), 125-130, 2012
222012
The Order–Disorder Transition in Graft Block Copolymers
MJ Maher, SD Jones, A Zografos, J Xu, HJ Schibur, FS Bates
Macromolecules 51 (1), 232-241, 2018
162018
Interactions between plasma and block copolymers used in directed self-assembly patterning
S Sirard, L Azarnouche, E Gurer, W Durand, M Maher, K Mori, G Blachut, ...
SPIE Advanced Lithography, 97820K-97820K-11, 2016
152016
The system can't perform the operation now. Try again later.
Articles 1–20