| Moving mask UV lithography for three-dimensional structuring Y Hirai, Y Inamoto, K Sugano, T Tsuchiya, O Tabata Journal of Micromechanics and Microengineering 17 (2), 199, 2006 | 94 | 2006 |
| Mixing speed-controlled gold nanoparticle synthesis with pulsed mixing microfluidic system K Sugano, Y Uchida, O Ichihashi, H Yamada, T Tsuchiya, O Tabata Microfluidics and nanofluidics 9, 1165-1174, 2010 | 58 | 2010 |
| Reduction of surface roughness and aperture size effect for etching of Si with XeF2 K Sugano, O Tabata Journal of Micromechanics and Microengineering 12 (6), 911, 2002 | 47 | 2002 |
| Tensile and tensile-mode fatigue testing of microscale specimens in constant humidity environment T Tsuchiya, Y Yamaji, K Sugano, O Tabata Experimental Mechanics 50, 509-516, 2010 | 37 | 2010 |
| Electrostatic Tensile Testing Device With Nanonewton and Nanometer Resolution and Its Application toNanowire Testing T Tsuchiya, Y Ura, K Sugano, O Tabata Journal of microelectromechanical systems 21 (3), 523-529, 2012 | 36 | 2012 |
| Micropowder blasting with nanoparticles dispersed polymer mask for rapid prototyping of glass chip H Yagyu, K Sugano, S Hayashi, O Tabata Journal of Micromechanics and Microengineering 15 (6), 1236, 2005 | 36 | 2005 |
| Micromachined tactile sensor for soft-tissue compliance detection AMRF El Bab, K Sugano, T Tsuchiya, O Tabata, MEH Eltaib, MM Sallam Journal of Microelectromechanical Systems 21 (3), 635-645, 2012 | 35 | 2012 |
| A differential capacitive three-axis SOI accelerometer using vertical comb electrodes H Hamaguchi, K Sugano, T Tsuchiya, O Tabata TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and …, 2007 | 34 | 2007 |
| Design and simulation of a tactile sensor for soft-tissue compliance detection AMRF El Bab, T Tamura, K Sugano, T Tsuchiya, O Tabata, MEH Eltaib, ... IEEJ Transactions on Sensors and Micromachines 128 (5), 186-192, 2008 | 27 | 2008 |
| Fabrication of gold nanoparticle pattern using combination of self-assembly and two-step transfer K Sugano, T Ozaki, T Tsuchiya, O Tabata Sensors and Materials 23 (5), 263-275, 2011 | 24 | 2011 |
| Versatile method of submicroparticle pattern formation using self-assembly and two-step transfer T Ozaki, K Sugano, T Tsuchiya, O Tabata Journal of microelectromechanical systems 16 (3), 746-752, 2007 | 23 | 2007 |
| Embedded microstructure fabrication using developer-permeability of semi-cross-linked negative resist Y Hirai, K Sugano, T Tsuchiya, O Tabata Journal of microelectromechanical systems 19 (5), 1058-1069, 2010 | 22 | 2010 |
| A three-dimensional microstructuring technique exploiting the positive photoresist property Y Hirai, K Sugano, T Tsuchiya, O Tabata Journal of Micromechanics and Microengineering 20 (6), 065005, 2010 | 21 | 2010 |
| Simulation of mechanical properties of epoxy-based chemically amplified resist by coarse-grained molecular dynamics H Yagyu, Y Hirai, A Uesugi, Y Makino, K Sugano, T Tsuchiya, O Tabata Polymer 53 (21), 4834-4842, 2012 | 20 | 2012 |
| Mechanical calibration of MEMS springs with sub-micro-Newton force resolution K Miyamoto, T Jomori, K Sugano, O Tabata, T Tsuchiya Sensors and Actuators A: Physical 143 (1), 136-142, 2008 | 20 | 2008 |
| Surface-enhanced Raman spectroscopy using linearly arranged gold nanoparticles embedded in nanochannels K Sugano, K Suekuni, T Takeshita, K Aiba, Y Isono Japanese Journal of Applied Physics 54 (6S1), 06FL03, 2015 | 19 | 2015 |
| Design and fabrication of a differential capacitive three‐axis SOI accelerometer using vertical comb electrodes T Tsuchiya, H Hamaguchi, K Sugano, O Tabata IEEJ Transactions on electrical and electronic engineering 4 (3), 345-351, 2009 | 17 | 2009 |
| Single-molecule surface-enhanced Raman spectroscopy of 4, 4′-bipyridine on a prefabricated substrate with directionally arrayed gold nanoparticle dimers K Sugano, K Aiba, K Ikegami, Y Isono Japanese Journal of Applied Physics 56 (6S1), 06GK01, 2017 | 16 | 2017 |
| Sequential and selective self-assembly of micro components by DNA grafted polymer T Tanemura, G Lopez, R Sato, K Sugano, T Tsuchiya, O Tabata, M Fujita, ... 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems …, 2009 | 15 | 2009 |
| Manipulation system for nano/micro components integration via transportation and self-assembly Y Higuchi, T Kusakabe, T Tanemura, K Sugano, T Tsuchiya, O Tabata 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems …, 2008 | 15 | 2008 |
