SiO2 Etching with Aqueous HF: Design and Development of a Laboratory-Scale Integrated Wet Etch/Dry Reactor AA Pande, DSL Mui, DW Hess Semiconductor Manufacturing, IEEE Transactions on 24 (1), 104-116, 2011 | 15 | 2011 |
A task-based synthesis approach toward the design of industrial crystallization process units AR Menon, AA Pande, HJM Kramer, PJ Jansens, J Grievink Industrial & engineering chemistry research 46 (12), 3979-3996, 2007 | 13 | 2007 |
Formulation of selective etch chemistries for silicon dioxide–based films AA Pande, G Levitin, DW Hess Journal of The Electrochemical Society 157 (6), G147, 2010 | 5 | 2010 |
Design of a Novel Wet-Etch Reactor and Etch Chemistries: Simulations and Experimental Verification A Pande, G Levitin, DS Mui, D Hess ECS Transactions 28 (2), 109, 2010 | 4 | 2010 |
Mechanism of fluoride-based etch and clean processes AA Pande Georgia Institute of Technology, 2011 | | 2011 |
Task-Based Superstructures for novel crystallizer designs AR Menon, AA Pande, HJM Kramer, J Grievink 16th International symposium on Industrial Crystallization ISIC16, 879-884, 2005 | | 2005 |
D-20 TASK-BASED SUPERSTRUCTURES FOR NOVEL CRYSTALLIZER DESIGNS AR Menon, AA Pande, HJM Kramer, J Grievink VDI BERICHTE 1901 (2), 879, 2005 | | 2005 |
Design and modelling strategies for industrial crystallisation processes HJM Kramer, AA Pande, AR Menon, SK Bermingham, J Grievink 2nd international symposium on industrial crystallization inspiring powder …, 2004 | | 2004 |