M Surendra
M Surendra
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Cited by
Cited by
A Monte Carlo collision model for the particle-in-cell method: applications to argon and oxygen discharges
V Vahedi, M Surendra
Computer Physics Communications 87 (1-2), 179-198, 1995
Gate linewidth tailoring and critical dimension control for sub-100 nm devices using plasma etching
JJ Brown, SV Deshpande, DV Horak, M Surendra, LY Tsou, Q Yang, C Yu, ...
US Patent 6,864,041, 2005
Self-consistent model of a direct-current glow discharge: Treatment of fast electrons
M Surendra, DB Graves, GM Jellum
Physical Review A 41 (2), 1112, 1990
Particle simulations of radio-frequency glow discharges
M Surendra, DB Graves
IEEE transactions on plasma science 19 (2), 144-157, 1991
Methods and apparatus for managing computing deployment in presence of variable workload
DW Coleman, SE Froehlich, JL Hellerstein, LS Hsiung, ER Lassettre, ...
US Patent 7,350,186, 2008
Capacitively coupled glow discharges at frequencies above 13.56 MHz
M Surendra, DB Graves
Applied physics letters 59 (17), 2091-2093, 1991
Closed air gap interconnect structure
KL Saenger, M Surendra, SV Nitta, S Purushothaman, ME Colburn, ...
US Patent 7,361,991, 2008
Adaptive self-tuning memory in DB2
AJ Storm, C Garcia-Arellano, SS Lightstone, Y Diao, M Surendra
Proceedings of the 32nd international conference on Very large data bases …, 2006
Electron heating in low‐pressure rf glow discharges
M Surendra, DB Graves, IJ Morey
Applied physics letters 56 (11), 1022-1024, 1990
Electron acoustic waves in capacitively coupled, low-pressure rf glow discharges
M Surendra, DB Graves
Physical review letters 66 (11), 1469, 1991
Radiofrequency discharge benchmark model comparison
M Surendra
Plasma Sources Science and Technology 4 (1), 56, 1995
Moment analysis of rf parallel-plate-discharge simulations using the particle-in-cell with Monte Carlo collisions technique
M Surendra, M Dalvie
Physical Review E 48 (5), 3914, 1993
Methods and apparatus for performing adaptive and robust prediction
SE Froehlich, JL Hellerstein, ER Lassettre, TW Mummert, M Surendra
US Patent 7,039,559, 2006
User configurable multivariate time series reduction tool control method
RJ Bunkofske, JZ Colt Jr, JJ McGill, NT Pascoe, M Surendra, ...
US Patent 6,442,445, 2002
Fluorocarbon high density plasma. VI. Reactive ion etching lag model for contact hole silicon dioxide etching in an electron cyclotron resonance plasma
O Joubert, GS Oehrlein, M Surendra
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 12 (3 …, 1994
Systems and methods for providing constrained optimization using adaptive regulatory control
Y Diao, CM Garcia-Arellano, JL Hellerstein, SS Lightstone, SS Parekh, ...
US Patent 7,346,401, 2008
Using MIMO linear control for load balancing in computing systems
Y Diao, JL Hellerstein, AJ Storm, M Surendra, S Lightstone, S Parekh, ...
Proceedings of the 2004 American Control Conference 3, 2045-2050, 2004
Controlling quality of service in multi-tier web applications
Y Diao, JL Hellerstein, S Parekh, H Shaikh, M Surendra
26th IEEE International Conference on Distributed Computing Systems (ICDCS …, 2006
Self‐consistent dc glow‐discharge simulations applied to diamond film deposition reactors
M Surendra, DB Graves, LS Plano
Journal of applied physics 71 (10), 5189-5198, 1992
Methods and systems for control discovery in computing systems
Y Diao, FN Eskesen, SE Froehlich, JL Hellerstein, A Keller, ...
US Patent 7,565,655, 2009
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