Stoyan Nihtianov
Stoyan Nihtianov
Assoc. professor of Industrial Electronic Instrumentation, TU Delft
Verified email at tudelft.nl
TitleCited byYear
A capacitance-to-digital converter for displacement sensing with 17b resolution and 20μs conversion time
S Xia, K Makinwa, S Nihtianov
2012 IEEE International Solid-State Circuits Conference, 198-200, 2012
1022012
Lithographic apparatus and device manufacturing method
TPM Cadee, JJ Ottens, JJSM Mertens, FE De Jong, K Goorman, ...
US Patent 7,304,715, 2007
1012007
Lithographic apparatus and device manufacturing method having liquid evaporation control
TPM Cadee, JHW Jacobs, N Ten Kate, ER Loopstra, ALHJ Vermeer, ...
US Patent 7,804,575, 2010
972010
Design strategies for eddy-current displacement sensor systems: Review and recommendations
MR Nabavi, SN Nihtianov
IEEE Sensors Journal 12 (12), 3346-3355, 2012
732012
Pure boron-doped photodiodes: a solution for radiation detection in EUV lithography
F Sarubbi, LK Nanver, TLM Scholtes, SN Nihtianov, F Scholze
ESSDERC 2008-38th European Solid-State Device Research Conference, 278-281, 2008
602008
Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector
SN al.
US Patent 8426831 B2, 2013
52*2013
Comparative study of silicon-based ultraviolet photodetectors
L Shi, S Nihtianov
IEEE Sensors Journal 12 (7), 2453-2459, 2012
482012
Eddy-current sensor interface for advanced industrial applications
MR Nabavi, S Nihtianov
IEEE Transactions on Industrial Electronics 58 (9), 4414-4423, 2010
452010
Capacitive-sensor interface with high accuracy and stability
R Nojdelov, S Nihtianov
IEEE Transactions on Instrumentation and Measurement 58 (5), 1633-1639, 2009
392009
Smart Sensors and MEMS: Intelligent Sensing Devices and Microsystems for Industrial Applications
S Nihtianov, A Luque
Woodhead Publishing, 2018
352018
Measuring in the subnanometer range: Capacitive and eddy current nanodisplacement sensors
S Nihtianov
IEEE Industrial Electronics Magazine 8 (1), 6-15, 2014
332014
An interface circuit for RC impedance sensors with a relaxation oscillator
SN Nihtianov, GP Shterev, B Iliev, GCM Meijer
IEEE Transactions on Instrumentation and Measurement 50 (6), 1563-1567, 2001
332001
Parallel-field Hall microsensors: an overview
CS Roumenin
Sensors and Actuators A: Physical 30 (1-2), 77-87, 1992
331992
A novel interface for eddy current displacement sensors
MR Nabavi, S Nihtianov
IEEE transactions on instrumentation and measurement 58 (5), 1623-1632, 2009
312009
Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector
S Nihtianov, AJ Van Der Sijs, B Moest, PWJM Kemper, MAM Haast, ...
US Patent 8,138,485, 2012
292012
Power-efficient high-speed and high-resolution capacitive-sensor interface for subnanometer displacement measurements
S Xia, S Nihtianov
IEEE Transactions on Instrumentation and Measurement 61 (5), 1315-1322, 2012
282012
High performance silicon-based extreme ultraviolet (EUV) radiation detector for industrial application
L Shi, F Sarubbi, SN Nihtianov, LK Nanver, TLM Scholtes, F Scholze
2009 35th Annual Conference of IEEE Industrial Electronics, 1877-1882, 2009
262009
9.8 An energy-efficient 3.7 nV/√ Hz bridge-readout IC with a stable bridge offset compensation scheme
H Jiang, KAA Makinwa, S Nihtianov
2017 IEEE International Solid-State Circuits Conference (ISSCC), 172-173, 2017
242017
An interface for eddy-current displacement sensors with 15-bit resolution and 20 MHz excitation
MR Nabavi, MAP Pertijs, S Nihtianov
IEEE Journal of Solid-State Circuits 48 (11), 2868-2881, 2013
242013
Surface-charge-collection-enhanced high-sensitivity high-stability silicon photodiodes for DUV and VUV spectral ranges
L Shi, S Nihtianov, L Haspeslagh, F Scholze, A Gottwald, LK Nanver
IEEE transactions on electron devices 59 (11), 2888-2894, 2012
242012
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