| High speed silicon wet anisotropic etching for applications in bulk micromachining: a review P Pal, V Swarnalatha, AVN Rao, AK Pandey, H Tanaka, K Sato Micro and Nano systems letters 9, 1-59, 2021 | 60 | 2021 |
| Etching characteristics of Si {110} in 20 wt% KOH with addition of hydroxylamine for the fabrication of bulk micromachined MEMS AVN Rao, V Swarnalatha, P Pal Micro and Nano Systems Letters 5, 1-9, 2017 | 53 | 2017 |
| Modified TMAH based etchant for improved etching characteristics on Si {1 0 0} wafer V Swarnalatha, AVN Rao, A Ashok, SS Singh, P Pal Journal of Micromechanics and Microengineering 27 (8), 085003, 2017 | 26 | 2017 |
| Effect of NH2OH on etching characteristics of Si {100} in KOH solution AVN Rao, V Swarnalatha, A Ashok, SS Singh, P Pal ECS Journal of Solid State Science and Technology 6 (9), P609, 2017 | 16 | 2017 |
| Effective improvement in the etching characteristics of Si {110} in low concentration TMAH solution V Swarnalatha, AV Narasimha Rao, P Pal Micro & Nano Letters 13 (8), 1085-1089, 2018 | 15 | 2018 |
| Determination of precise crystallographic directions on Si {111} wafers using self-aligning pre-etched pattern AV Narasimha Rao, V Swarnalatha, AK Pandey, P Pal Micro and Nano Systems Letters 6, 1-9, 2018 | 12 | 2018 |
| Etching mechanism behind the high-speed etching of silicon in NH2OH-added alkaline solutions V Swarnalatha, KT Vismaya, AVN Rao, P Pal, AK Pandey, H Tanaka, ... IEEJ Transactions on Sensors and Micromachines 140 (1), 24-30, 2020 | 10 | 2020 |
| Precise identification of< 1 0 0> directions on Si {0 0 1} wafer using a novel self-aligning pre-etched technique SS Singh, S Veerla, V Sharma, AK Pandey, P Pal Journal of Micromechanics and Microengineering 26 (2), 025012, 2016 | 8 | 2016 |
| A measurement free pre-etched pattern to identify the< 110> directions on Si {110} wafer SS Singh, VN Avvaru, S Veerla, AK Pandey, P Pal Microsystem Technologies 23, 2131-2137, 2017 | 7 | 2017 |
| Aging effects of KOH+ NH2OH solution on the etching characteristics of silicon AVN Rao, P Pal, AK Pandey, V Swarnalatha, PK Menon, H Tanaka, ... ECS Journal of Solid State Science and Technology 8 (11), P685, 2019 | 6 | 2019 |
| Systematic study of the etching characteristics of Si {111} in modified TMAH V Swarnalatha, P Pal, AK Pandey, AV Narasimha Rao, Y Xing, H Tanaka, ... Micro & Nano Letters 15 (1), 52-57, 2020 | 4 | 2020 |
| Enhanced etching characteristics of Si {100} in NaOH-based two-component solution V Swarnalatha, S Purohit, P Pal, RK Sharma Micro and Nano Systems Letters 10 (1), 10, 2022 | 3 | 2022 |
| Silicon anisotropic etching in ternary solution composed of TΜΑΗ+ Triton+ NH2ΟΗ V Swarnalatha, AVN Rao, P Pal ECS Transactions 77 (11), 1737, 2017 | 2 | 2017 |
| Precise identification of< 100> directions on Si10011 wafer using a novel self-aligning pre-etched SS Singh, S Veerla, V Sharma, AK Pandey, P Pal | 2* | 2015 |
| Physio-chemical and biological Characterizations of 4 Bromo–4'Chloro Benzylidene Aniline μ-crystals for Engineering Utilities N Balamurugapandian, K SenthilKannan, V Swarnalatha ECS Journal of Solid State Science and Technology 13 (4), 043002, 2024 | 1 | 2024 |
| Synthesis and characterizations of l-lysinium trichloroacetate crystals of versatile scaling for temperature sensor and opto-electronic utilities M Meena, K SenthilKannan, V Swarnalatha, KS Radha Journal of Materials Science: Materials in Electronics 35 (10), 1-11, 2024 | 1 | 2024 |
| Wet anisotropic etching characteristics of Si {111} in NaOH-based solution for silicon bulk micromachining S Purohit, V Swarnalatha, AK Pandey, P Pal Micro and Nano Systems Letters 10 (1), 21, 2022 | 1 | 2022 |
| Deep Grooves in Borofloat Glass by Wet Bulk Micromachining A Nigam, S Veerla, P Pal Conference on Microactuators and Micromechanisms, 290-295, 2022 | 1 | 2022 |
| Wet bulk micromachining characteristics of Si {110} in NaOH-based solution S Purohit, V Swarnalatha, AK Pandey, RK Sharma, P Pal Journal of Micromechanics and Microengineering 32 (12), 124001, 2022 | 1 | 2022 |
| Study of Fast Etching of Silicon for the Fabrication of Bulk Micromachined MEMS Structures V Swarnalatha, AVN Rao, P Pal International Journal of Materials and Metallurgical Engineering 11 (12 …, 2017 | 1 | 2017 |
Dr. Prem PalProfessor, Dept. of Physics, IIT Hyderabad, IndiaVerified email at iith.ac.in
