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Surendra Kumar Soni
Surendra Kumar Soni
Pr. Engineer
Verified email at tsmc.com
Title
Cited by
Cited by
Year
Development of low temperature RF magnetron sputtered ITO films on flexible substrate
TP Muneshwar, V Varma, N Meshram, S Soni, RO Dusane
Solar energy materials and solar cells 94 (9), 1448-1450, 2010
402010
High deposition rate device quality a-Si: H films at low substrate temperature by HWCVD technique
SK Soni, A Phatak, RO Dusane
Solar energy materials and solar cells 94 (9), 1512-1515, 2010
162010
Automated inspection tool
CH Lin, LEE Chien-Fa, HS Liu, JR Pai, S Chuang, SK Soni, SW Kuo, ...
US Patent 10,490,463, 2019
72019
Automated inspection tool
CH Lin, LEE Chien-Fa, HS Liu, JR Pai, S Chuang, SK Soni, SW Kuo, ...
US Patent 11,961,770, 2024
12024
Automated inspection tool
CH Lin, LEE Chien-Fa, HS Liu, JR Pai, S Chuang, SK Soni, SW Kuo, ...
US Patent 11,171,065, 2021
12021
Effect of Number of Filaments on the Structure, Composition and Electrical Properties of µc-Si: h Layers Deposited Using HWCVD Technique
SK Soni, RO Dusane
Journal of Nano-and Electronic Physics 3 (1), 551, 2011
12011
Development of a-Si:H Single Junction n-i-p Solar Cell on Steel Substrates by HWCVD Process
ROD S.K. Soni, Pavan Kumar Bijalwan, Abhijeet Sangle, Bhagwati Prasad ...
TATA SEARCH, 199-202, 2016
2016
Designing Single Chamber Hwcvd System for High Deposition Rate Device Quality A-Si: h Thin Films and Solar Cells
NA Wadibhasme, SK Soni, A Kumbhar, N Meshram, RO Dusane
Journal of Nano-and Electronic Physics 3 (1), 942, 2011
2011
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