Bayesian inference for mining semiconductor manufacturing big data for yield enhancement and smart production to empower industry 4.0 M Khakifirooz, CF Chien, YJ Chen Applied Soft Computing 68, 990-999, 2018 | 100 | 2018 |
A system for online detection and classification of wafer bin map defect patterns for manufacturing intelligence CF Chien, SC Hsu, YJ Chen International Journal of Production Research 51 (8), 2324-2338, 2013 | 98 | 2013 |
Overlay error compensation using advanced process control with dynamically adjusted proportional-integral R2R controller CF Chien, YJ Chen, CY Hsu, HK Wang IEEE Transactions on Automation Science and Engineering 11 (2), 473-484, 2014 | 53 | 2014 |
An empirical study of demand forecasting of non-volatile memory for smart production of semiconductor manufacturing YJ Chen, CF Chien International Journal of Production Research 56 (13), 4629-4643, 2018 | 49 | 2018 |
Manufacturing intelligence for reducing false alarm of defect classification by integrating similarity matching approach in CMOS image sensor manufacturing YJ Chen, CY Fan, KH Chang Computers & Industrial Engineering 99, 465-473, 2016 | 39 | 2016 |
A Novel Approach to Hedge and Compensate the Critical Dimension Variation of the Developed-and-Etched Circuit Patterns for Yield Enhancement in Semiconductor Manufacturing CF Chien, YJ Chen, CY Hsu Computers & Operations Research, 2014 | 31 | 2014 |
Method of defect image classification through integrating image analysis and data mining KH Chang, CF Chien, YJ Chen US Patent 9,082,009, 2015 | 23 | 2015 |
AI and big data analytics for wafer fab energy saving and chiller optimization to empower intelligent manufacturing CF Chien, YJ Chen, YT Han, MK Hsieh, CM Lee, T Shih, MY Wu, ... 2018 e-Manufacturing & Design Collaboration Symposium (eMDC), 1-4, 2018 | 17 | 2018 |
Feature extraction for defect classification and yield enhancement in color filter and micro-lens manufacturing: An empirical study YJ Chen, TH Lin, KH Chang, CF Chien Journal of Industrial and Production Engineering 30 (8), 510-517, 2013 | 16 | 2013 |
Big data analytic for multivariate fault detection and classification in semiconductor manufacturing YJ Chen, BC Wang, JZ Wu, YC Wu, CF Chien 2017 13th IEEE Conference on Automation Science and Engineering (CASE), 731-736, 2017 | 12 | 2017 |
Big data analytics for modeling WAT parameter variation induced by process tool in semiconductor manufacturing and empirical study CF Chien, YJ Chen, JZ Wu 2016 Winter Simulation Conference (WSC), 2512-2522, 2016 | 10 | 2016 |
Modeling collinear WATs for parametric yield enhancement in semiconductor manufacturing CF Chien, PC Lee, R Dou, YJ Chen, CC Chen 2017 13th IEEE Conference on Automation Science and Engineering (CASE), 739-743, 2017 | 7 | 2017 |
Method of dispatching semiconductor batch production CF Chien, CY Hsu, YJ Chen US Patent 9,513,626, 2016 | 5 | 2016 |
Manufacturing intelligence and smart production for industry 3.5 and empirical study of decision-based virtual metrology for controlling overlay errors CF Chien, YJ Chen 2016 International Symposium on VLSI Design, Automation and Test (VLSI-DAT), 1-4, 2016 | 4 | 2016 |
Advanced Process Control for Semiconductor Yield Enhancement and Manufacturing Intelligence YJ Chen, CY Hsu, CF Chien Proceedings of 12th Asia Pacific Industrial Engineering & Management Systems …, 2011 | 1 | 2011 |
半導體先進製程控制之品質工程研究架構及實證研究 陳暎仁 清華大學工業工程與工程管理學系學位論文, 1-102, 2013 | | 2013 |
Manufacturing intelligence for determining machine subgroups to enhance yield in semiconductor manufacturning CF Chien, YJ Chen, CY Hsu, YH Yeh Proceedings of the 2011 Winter Simulation Conference (WSC), 1893-1902, 2011 | | 2011 |