| Structural and electrical characteristics of RF-sputtered HfO2 high-k based MOS capacitors PM Tirmali, AG Khairnar, BN Joshi, AM Mahajan Solid-state electronics 62 (1), 44-47, 2011 | 89 | 2011 |
| Effect of post-deposition annealing temperature on RF-Sputtered HfO< sub> 2</sub> thin film for advanced CMOS technology AG Khairnar, AM Mahajan Solid State Sciences 15, 24-28, 2013 | 80 | 2013 |
| Growth and characterization of SiON thin films by using thermal-CVD machine RK Pandey, LS Patil, JP Bange, DR Patil, AM Mahajan, DS Patil, ... Optical materials 25 (1), 1-7, 2004 | 63 | 2004 |
| Growth of SiO2 films by TEOS-PECVD system for microelectronics applications AM Mahajan, LS Patil, JP Bange, DK Gautam Surface and Coatings Technology 183 (2-3), 295-300, 2004 | 61 | 2004 |
| Sol–gel deposited ceria thin films as gate dielectric for CMOS technology AG Khairnar, AM Mahajan Bulletin of Materials Science 36 (2), 259–263., 2013 | 31 | 2013 |
| Electrical properties of MOS capacitors formed by PEALD grown Al2O3 on silicon AM Mahajan, AG Khairnar, BJ Thibeault Semiconductors 48, 497-500, 2014 | 28 | 2014 |
| TEOS-PECVD system for high growth rate deposition of SiO2 films AM Mahajan, LS Patil, JP Bange, DK Gautam Vacuum 79 (3-4), 194-202, 2005 | 25 | 2005 |
| HfO2 gate dielectric on Ge (1 1 1) with ultrathin nitride interfacial layer formed by rapid thermal NH3 treatment KS Agrawal, VS Patil, AG Khairnar, AM Mahajan Applied Surface Science 364, 747-751, 2016 | 21 | 2016 |
| Surface texture modification of spin-coated SiO2 xerogel thin films by TMCS silylation YS Mhaisagar, BN Joshi, AM Mahajan Bulletin of Materials Science 35, 151-155, 2012 | 21 | 2012 |
| Structural and electrical properties of ultra-thin high-k ZrO2 film on nitride passivated Ge (100) prepared by PEALD VS Patil, KS Agrawal, AG Khairnar, BJ Thibeault, AM Mahajan Materials Science in Semiconductor Processing 56, 277-281, 2016 | 18 | 2016 |
| Ammonia gas sensing characteristics of chemically synthesized polyaniline matrix RG Bavane, MD Shirsat, AM Mahajan Sensors & Transducers 113 (2), 63, 2010 | 18 | 2010 |
| High Dielectric Constant ZrO2 Films by Atomic Layer Deposition Technique on Germanium Substrates AM Mahajan, AG Khairnar, BJ Thibeault Silicon 8, 345-350, 2016 | 17 | 2016 |
| XPS study of homemade plasma enhanced atomic layer deposited La2O3/ZrO2 bilayer thin films V Patil, K Agrawal, V Barhate, S Patil, A Mahajan Semiconductor Science and Technology 34 (3), 034004, 2019 | 15 | 2019 |
| Electronic nose: A toxic gas sensor by polyaniline thin film conducting polymer AG Shrivas, RG Bavane, AM Mahajan 2007 International Workshop on Physics of Semiconductor Devices, 621-623, 2007 | 15 | 2007 |
| Growth and characterization of porous SiO2 thin films for interlayer dielectrics applications in ULSI BN Joshi, AM Mahajan Optoelectronics and Advanced Materials 1 (12), 659-662, 2007 | 15 | 2007 |
| Preparation of rare earth CeO2 thin films using metal organic decomposition method for metal-oxide–semiconductor capacitors KS Agrawal, VS Patil, AG Khairnar, AM Mahajan Journal of Materials Science: Materials in Electronics 28, 12503-12508, 2017 | 12 | 2017 |
| Post-deposition-annealed lanthanum-doped cerium oxide thin films: structural and electrical properties VN Barhate, KS Agrawal, VS Patil, AM Mahajan Rare Metals 40 (7), 1835-1843, 2021 | 9 | 2021 |
| Deposition characterization of low-k hybrid thin films using methyl methacrylate for ULSI applications BN Joshi, AM Mahajan Materials Science and Engineering: B 168 (1-3), 182-185, 2010 | 9 | 2010 |
| Synthesis and characterization of sol-gel derived CeO2 dielectric thin films for CMOS devices AB Patil, AM Mahajan Optoelectronics and Advanced Materials, Rapid Communications 2 (12), 811-813, 2008 | 9 | 2008 |
| The effect of post-deposition annealing on the chemical, structural and electrical properties of Al/ZrO2/La2O3/ZrO2/Al high-k nanolaminated MIM capacitors SR Patil, VN Barhate, VS Patil, KS Agrawal, AM Mahajan Journal of Materials Science: Materials in Electronics 33 (14), 11227-11235, 2022 | 8 | 2022 |
Anil G. KhairnarK.R.T. Arts, B.H. Commerce and A.M. Science College, Nashik and North Maharashtra UniversityVerified email at nmu.ac.in
