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Sukhyun Choi
Sukhyun Choi
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Title
Cited by
Cited by
Year
Dynamic spectroscopic ellipsometry based on a one-piece polarizing interferometric scheme
V Dembele, S Choi, W Chegal, I Choi, MJ Paul, J Kim, D Kim
Optics Communications 454, 124426, 2020
182020
Dynamic spectroscopic imaging ellipsometry
D Kim, V Dembele, S Choi, G Hwang, S Kheiryzadehkhanghah, C Joo, ...
Optics Letters 47 (5), 1129-1132, 2022
52022
Robust dynamic spectroscopic imaging ellipsometer based on a monolithic polarizing Linnik interferometer
G Hwang, I Choi, S Choi, S Kheiryzadehkhanghah, W Chegal, S Kim, ...
Optics Express 31 (12), 19569-19587, 2023
42023
High speed thin film thickness mapping by using dynamic spectroscopic imaging ellipsometry
D Kim, V Dembele, S Choi, G Hwang, S Kheiryzadehkhanghah, I Choi, ...
Optical Technology and Measurement for Industrial Applications Conference …, 2022
32022
Interferometric snapshot spectro-ellipsometry: calibration and systematic error analysis
V Dembele, I Choi, S Kheiryzadehkhanghah, S Choi, J Kim, CS Kim, ...
Current Optics and Photonics 4 (4), 345-352, 2020
32020
Thermal stability analysis of interferometric snapshot spectro-polarimeter
I Choi, V Dembele, MJ Paul, S Choi, J Kim, BJ Baek, D Kim
Journal of the Semiconductor & Display Technology 17 (3), 70-74, 2018
12018
Dynamic ultra-thin film thickness line-profile extraction from a warped Si substrate
S Kheiryzadehkhanghah, G Hwang, I Choi, S Choi, D Kim
Metrology, Inspection, and Process Control XXXVIII 12955, 246-249, 2024
2024
Dynamic spectroscopic imaging ellipsometer for high-throughput full patterned wafer mapping
G Hwang, S Kheiryzadehkhanghah, S Choi, I Choi, S Kim, D Kim
Metrology, Inspection, and Process Control XXXVIII 12955, 45-49, 2024
2024
High speed 2D material visualization by using a microscopic dynamic spectroscopic imaging ellipsometer
S Choi, G Hwang, S Kheiryzadehkhanghah, I Choi, W Chegal, Y Cho, ...
Metrology, Inspection, and Process Control XXXVIII 12955, 59-61, 2024
2024
일체형 분광편광간섭모듈 기반분광타원편광계의 정확도 향상
G Hwang, J Shim, I Choi, S Choi, S Kheiryzadehkhanghah, D Kim
반도체디스플레이기술학회지 제 22 (3), 2023
2023
Full Stokes polarimetry using a monolithic off-axis polarizing interferometer and a 2D array sensor
S Kheiryzadehkhanghah, V Dembele, G Hwang, J Shim, I Choi, S Choi, ...
Applied Optics 62 (8), 1943-1951, 2023
2023
Large scale thin film thickness uniformity extraction based on dynamic spectroscopic ellipsometry
D Kim, G Hwang, S Choi, V Dembele, S Kheiryzadehkhanghah, I Choi, ...
Optical Technology and Measurement for Industrial Applications Conference …, 2021
2021
Long-term Stability Optimization of Dynamic Spectroscopic Ellipsometery based on Dual-wavelength Calibration
I Choi, S Kheiryzadehkhanghah, S Choi, G Hwang, J Shim, D Kim
Journal of the Semiconductor & Display Technology 20 (3), 178-183, 2021
2021
High speed thin film thickness uniformity measurement based on interferometric snapshot spectroellipsometer
S Choi, D Vamara, I Choi, JP Madhan, J Kim, D Kim
한국생산제조학회 학술발표대회 논문집, 29-29, 2018
2018
Direct spatially resolved snapshot polarimetric phase extraction by using an imaging PolarCam
DG Abdelsalam, V Dembele, I Choi, JP Madhan, S Choi, J Kim, D Kim
Conference on Lasers and Electro-Optics/Pacific Rim, Tu2F. 2, 2018
2018
High-Speed 2d Materials Inspection Using Microscopic Dynamic Spectroscopic Imaging Ellipsometer
S Choi, CY Woo, G Hwang, S Kheiryzadehkhanghah, I Choi, YJ Cho, ...
Available at SSRN 4750242, 0
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Articles 1–16