Dynamic spectroscopic ellipsometry based on a one-piece polarizing interferometric scheme V Dembele, S Choi, W Chegal, I Choi, MJ Paul, J Kim, D Kim Optics Communications 454, 124426, 2020 | 18 | 2020 |
Dynamic spectroscopic imaging ellipsometry D Kim, V Dembele, S Choi, G Hwang, S Kheiryzadehkhanghah, C Joo, ... Optics Letters 47 (5), 1129-1132, 2022 | 5 | 2022 |
Robust dynamic spectroscopic imaging ellipsometer based on a monolithic polarizing Linnik interferometer G Hwang, I Choi, S Choi, S Kheiryzadehkhanghah, W Chegal, S Kim, ... Optics Express 31 (12), 19569-19587, 2023 | 4 | 2023 |
High speed thin film thickness mapping by using dynamic spectroscopic imaging ellipsometry D Kim, V Dembele, S Choi, G Hwang, S Kheiryzadehkhanghah, I Choi, ... Optical Technology and Measurement for Industrial Applications Conference …, 2022 | 3 | 2022 |
Interferometric snapshot spectro-ellipsometry: calibration and systematic error analysis V Dembele, I Choi, S Kheiryzadehkhanghah, S Choi, J Kim, CS Kim, ... Current Optics and Photonics 4 (4), 345-352, 2020 | 3 | 2020 |
Thermal stability analysis of interferometric snapshot spectro-polarimeter I Choi, V Dembele, MJ Paul, S Choi, J Kim, BJ Baek, D Kim Journal of the Semiconductor & Display Technology 17 (3), 70-74, 2018 | 1 | 2018 |
Dynamic ultra-thin film thickness line-profile extraction from a warped Si substrate S Kheiryzadehkhanghah, G Hwang, I Choi, S Choi, D Kim Metrology, Inspection, and Process Control XXXVIII 12955, 246-249, 2024 | | 2024 |
Dynamic spectroscopic imaging ellipsometer for high-throughput full patterned wafer mapping G Hwang, S Kheiryzadehkhanghah, S Choi, I Choi, S Kim, D Kim Metrology, Inspection, and Process Control XXXVIII 12955, 45-49, 2024 | | 2024 |
High speed 2D material visualization by using a microscopic dynamic spectroscopic imaging ellipsometer S Choi, G Hwang, S Kheiryzadehkhanghah, I Choi, W Chegal, Y Cho, ... Metrology, Inspection, and Process Control XXXVIII 12955, 59-61, 2024 | | 2024 |
일체형 분광편광간섭모듈 기반분광타원편광계의 정확도 향상 G Hwang, J Shim, I Choi, S Choi, S Kheiryzadehkhanghah, D Kim 반도체디스플레이기술학회지 제 22 (3), 2023 | | 2023 |
Full Stokes polarimetry using a monolithic off-axis polarizing interferometer and a 2D array sensor S Kheiryzadehkhanghah, V Dembele, G Hwang, J Shim, I Choi, S Choi, ... Applied Optics 62 (8), 1943-1951, 2023 | | 2023 |
Large scale thin film thickness uniformity extraction based on dynamic spectroscopic ellipsometry D Kim, G Hwang, S Choi, V Dembele, S Kheiryzadehkhanghah, I Choi, ... Optical Technology and Measurement for Industrial Applications Conference …, 2021 | | 2021 |
Long-term Stability Optimization of Dynamic Spectroscopic Ellipsometery based on Dual-wavelength Calibration I Choi, S Kheiryzadehkhanghah, S Choi, G Hwang, J Shim, D Kim Journal of the Semiconductor & Display Technology 20 (3), 178-183, 2021 | | 2021 |
High speed thin film thickness uniformity measurement based on interferometric snapshot spectroellipsometer S Choi, D Vamara, I Choi, JP Madhan, J Kim, D Kim 한국생산제조학회 학술발표대회 논문집, 29-29, 2018 | | 2018 |
Direct spatially resolved snapshot polarimetric phase extraction by using an imaging PolarCam DG Abdelsalam, V Dembele, I Choi, JP Madhan, S Choi, J Kim, D Kim Conference on Lasers and Electro-Optics/Pacific Rim, Tu2F. 2, 2018 | | 2018 |
High-Speed 2d Materials Inspection Using Microscopic Dynamic Spectroscopic Imaging Ellipsometer S Choi, CY Woo, G Hwang, S Kheiryzadehkhanghah, I Choi, YJ Cho, ... Available at SSRN 4750242, 0 | | |