| Comparing XPS on bare and capped ZrN films grown by plasma enhanced ALD: Effect of ambient oxidation T Muneshwar, K Cadien Applied Surface Science 435, 367-376, 2018 | 60 | 2018 |
| Achieving ultrahigh corrosion resistance and conductive zirconium oxynitride coating on metal bipolar plates by plasma enhanced atomic layer deposition XZ Wang, TP Muneshwar, HQ Fan, K Cadien, JL Luo Journal of Power Sources 397, 32-36, 2018 | 43 | 2018 |
| Development of low temperature RF magnetron sputtered ITO films on flexible substrate TP Muneshwar, V Varma, N Meshram, S Soni, RO Dusane Solar Energy Materials and Solar Cells 94 (9), 1448-1450, 2010 | 40 | 2010 |
| Balancing the corrosion resistance and through-plane electrical conductivity of Cr coating via oxygen plasma treatment XZ Wang, HQ Fan, T Muneshwar, K Cadien, JL Luo Journal of Materials Science & Technology 61, 75-84, 2021 | 32 | 2021 |
| AxBAxB… pulsed atomic layer deposition: Numerical growth model and experiments T Muneshwar, K Cadien Journal of Applied Physics 119 (8), 2016 | 31 | 2016 |
| Surface reaction kinetics in atomic layer deposition: An analytical model and experiments T Muneshwar, K Cadien Journal of Applied Physics 124 (9), 2018 | 29 | 2018 |
| Low temperature plasma enhanced atomic layer deposition of conducting zirconium nitride films using tetrakis (dimethylamido) zirconium and forming gas (5% H2+ 95% N2) plasma T Muneshwar, K Cadien Journal of Vacuum Science & Technology A 33 (3), 2015 | 27 | 2015 |
| Probing initial-stages of ALD growth with dynamic in situ spectroscopic ellipsometry T Muneshwar, K Cadien Applied Surface Science 328, 344-348, 2015 | 26 | 2015 |
| Sustained hole inversion layer in a wide-bandgap metal-oxide semiconductor with enhanced tunnel current G Shoute, A Afshar, T Muneshwar, K Cadien, D Barlage Nature communications 7 (1), 10632, 2016 | 23 | 2016 |
| Atomic Layer Deposition: Fundamentals, Practice, and Challenges T Muneshwar, M Miao, ER Borujeny, K Cadien Handbook of Thin Film Deposition, 359-377, 2018 | 22 | 2018 |
| Handbook of Thin Film Deposition T Muneshwar, M Miao, ER Borujeny, K Cadien Elsevier, 2018 | 20 | 2018 |
| Plasma enhanced atomic layer deposition of ZnO with diethyl zinc and oxygen plasma: Effect of precursor decomposition T Muneshwar, G Shoute, D Barlage, K Cadien Journal of Vacuum Science & Technology A 34 (5), 2016 | 20 | 2016 |
| Zr2N2O Coating-Improved Corrosion Resistance for the Anodic Dissolution Induced by Cathodic Transient Potential XZ Wang, H Luo, T Muneshwar, HQ Fan, K Cadien, JL Luo ACS applied materials & interfaces 10 (46), 40111-40124, 2018 | 19 | 2018 |
| Saturation Behavior of Atomic Layer Deposition MnOx from Bis(Ethylcyclopentadienyl) Manganese and Water: Saturation Effect on Coverage of Porous Oxygen … MP Clark, T Muneshwar, M Xiong, K Cadien, DG Ivey ACS Applied Nano Materials 2 (1), 267-277, 2018 | 15 | 2018 |
| Influence of atomic layer deposition valve temperature on ZrN plasma enhanced atomic layer deposition growth T Muneshwar, K Cadien Journal of Vacuum Science & Technology A 33 (6), 2015 | 12 | 2015 |
| TiO2-HfN Radial Nano-Heterojunction: A Hot Carrier Photoanode for Sunlight-Driven Water-Splitting S Zeng, T Muneshwar, S Riddell, AP Manuel, E Vahidzadeh, R Kisslinger, ... Catalysts 11 (11), 1374, 2021 | 8 | 2021 |
| Tetraallyltin precursor for plasma enhanced atomic layer deposition of tin oxide: Growth study and material characterization T Muneshwar, D Barlage, K Cadien Journal of Vacuum Science & Technology A 37 (3), 2019 | 6 | 2019 |
| Parasitic Surface Reactions in High-Aspect Ratio Via Filling using ALD: A Stochastic Kinetic Model T Muneshwar, G Shoute, D Barlage, K Cadien 2018 IEEE International Electron Devices Meeting (IEDM), 40.2. 1-40.2. 4, 2018 | 3 | 2018 |
| ZnO Schottky Nanodiodes Processed From Plasma-Enhanced Atomic Layer Deposition at Near Room Temperature M Shen, TP Muneshwar, KC Cadien, YY Tsui, DW Barlage IEEE Transactions on Electron Devices 65 (10), 4513-4519, 2018 | 3 | 2018 |
| Stoichiometry controlled homogeneous ternary oxide growth in showerhead atomic layer deposition reactor and application for ZrxHf1− xO2 T Muneshwar, D Barlage, K Cadien Journal of Vacuum Science & Technology A 39 (3), 2021 | 1 | 2021 |
Kenneth CadienProfessor of Materials Engineering, University of AlbertaVerified email at ualberta.ca
