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Jeroen van Borkulo
Jeroen van Borkulo
jvborkulo@gmail.com
Verified email at besi.com
Title
Cited by
Cited by
Year
Enabling technology in thin wafer dicing
J Van Borkulo, R Evertsen, R Hendriks
ECS Transactions 18 (1), 837, 2009
192009
Arrangement and method for forming one or more separated scores in a surface of a substrate
J Van Borkulo, PH Chall
US Patent 7,947,920, 2011
172011
Laser vs. blade dicing for direct bonded heterogeneous integration (DBHi) Si bridge
A Jain, K Sikka, JM Gomez, D Parekh, M Bergendahl, J van Borkulo, ...
2021 IEEE 71st Electronic Components and Technology Conference (ECTC), 1125-1130, 2021
92021
Multi beam full cut dicing of thin Si IC wafers
J Van Borkulo, P Verburg, R Van Der Stam
2017 IEEE 67th Electronic Components and Technology Conference (ECTC), 1817-1822, 2017
82017
Paradigm shift in compound semiconductor production since the introduction of laser dicing
R Hendriks, J van Borkulo, M Mueller
Proceedings of Compound Semiconductor Manufacturing Technology Conference, 18-21, 2009
62009
Comparison between Single & Multi Beam Laser Grooving of Low-K layers
J van Borkulo, R Hendriks, P Dijkstra
International Symposium on Microelectronics 2012 (1), 000433-000439, 2012
52012
A more than moore enabling wafer dicing technology
J van Borkulo, R Evertsen, R van der Stam
2019 IEEE 69th Electronic Components and Technology Conference (ECTC), 423-427, 2019
42019
Laser-Based Full Cut Dicing Evaluations for Thin Si Wafers
J van Borkulo, R van der Stam
2018 IEEE 68th Electronic Components and Technology Conference (ECTC), 1951-1955, 2018
42018
Multi Beam Low-κ Grooving Evaluation of various removal principals
R van der Stam, J van Borkulo, P Dijkstra
International Symposium on Microelectronics 2013 (1), 000564-000568, 2013
22013
First Multi Beam Full Cut Laser Dicing of Thin Low K Wafers
JV Borkulo, R Hendriks
ECS Transactions 27 (1), 891, 2010
22010
A Laser Dicing Method for Plus-Shaped Dies for Heterogenous Integration Applications
A Jain, K Sikka, S Li, JM Gomez, M Bergendahl, S Skordas, J Van Borkulo, ...
2022 IEEE 72nd Electronic Components and Technology Conference (ECTC), 24-29, 2022
12022
Wafer Thinning and Dicing Technology for 3D Nand Flash
Q Ma, J Lin, H Liu, J van Borkulo
2019 China Semiconductor Technology International Conference (CSTIC), 1-4, 2019
12019
Multi beam low-k grooving evaluation of various removal principals
R van der Stam, J van Borkulo, P Dijkstra
2013 Eurpoean Microelectronics Packaging Conference (EMPC), 1-5, 2013
12013
Multi Beam Grooving and Full Cut Laser Dicing of IC Wafers
JV Borkulo, R Hendriks
ECS Transactions 34 (1), 873, 2011
12011
A Methodology to Optimize Laser Dicing Parameters to Maximize Dicing Quality Through Machine Learning
S Raghavan, A Jain, PR Chowdhury, K Sakuma, R Doll, K Biesheuvel, ...
2023 IEEE 73rd Electronic Components and Technology Conference (ECTC), 139-146, 2023
2023
Laser-Based Full Cut Dicing Evaluations for Thin Si wafers
P Dijkstra, J van Borkulo, R van der Stam
2020 China Semiconductor Technology International Conference (CSTIC), 1-5, 2020
2020
Laser Multi Beam Full Cut Dicing of Wafer Level Chip-Scale Packages
J van Borkulo, N Okamoto, T Yamada, T Menjo, M Nakamura
2017 IEEE 67th Electronic Components and Technology Conference (ECTC), 337-342, 2017
2017
Laser multi beam full cut dicing of wafer level chip-scale packages (FAN IN)
J van Borkulo, EMM Tan, R Boulanger
2016 IEEE 18th Electronics Packaging Technology Conference (EPTC), 752-757, 2016
2016
Multi Beam Grooving and Full Cut Laser Dicing of IC Wafers
J Van Borkulo, R Hendriks, P Dijkstra
ECS Transactions 44 (1), 969, 2012
2012
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